2018
DOI: 10.1088/2053-1591/aabe1b
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Atomic force microscopy analysis of surface topography of pure thin aluminum films

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Cited by 59 publications
(32 citation statements)
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“…The details of sputtering and AFM used in the present work were presented in an earlier work [18]. Prior to sputtering, the four substrate types have been ground with SiC papers of #320, #500, #800, #1200 and then finely polished by diamond pastes up to 1 μm and mirror appearance and cleaned in ultrasonic bath in ethanol for 3 minutes.…”
Section: Experiments and Methodsmentioning
confidence: 99%
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“…The details of sputtering and AFM used in the present work were presented in an earlier work [18]. Prior to sputtering, the four substrate types have been ground with SiC papers of #320, #500, #800, #1200 and then finely polished by diamond pastes up to 1 μm and mirror appearance and cleaned in ultrasonic bath in ethanol for 3 minutes.…”
Section: Experiments and Methodsmentioning
confidence: 99%
“…For each surface, five AFM images of sizes 256 × 256 pixels and scan areas of 3 × 3 μm 2 have been obtained and taken through Nanoscope V530r3sr3 software for computation of interface width, average roughness, skewness and coefficient of kurtosis according to the methods described in earlier publications [18,19]. The average roughness (Ra) is determined as…”
Section: Experiments and Methodsmentioning
confidence: 99%
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“…The high value of roughness (RMS) and skewness (Rsk) of the active layer with the thickness of 80 nm compared to 20 nm or other thickness (see Figure S3 (Supporting Information) for 40 and 60 nm) are resulted from the higher density of grains. [43,44] Moreover, Figure 4c,d shows the 2D fast Fourier transform (2D-FFT) of the corresponding AFM images depicting the symmetry of the respective surface morphologies. [45,46] The EQE spectra (Figure 5a) are similar for all the OPD devices with different thicknesses of the active layer.…”
Section: Introductionmentioning
confidence: 99%