2004
DOI: 10.1063/1.1764591
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Atomic force microscopy measurements of crystal nucleation and growth rates in thin films of amorphous Te alloys

Abstract: Ex situ atomic force microscopy in combination with a high-precision furnace has been employed for a systematic study of crystallization kinetics of sputtered amorphous Ag0.055In0.065Sb0.59Te0.29, Ge4Sb1Te5, and Ge2Sb2Te5 thin films used for optical data storage. Direct observation of crystals enabled us to establish the temperature dependence of the crystal nucleation rate and crystal growth velocity around 150°C. While these alloys exhibited similar crystal growth characteristics, the crystal nucleation beha… Show more

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Cited by 174 publications
(134 citation statements)
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“…15). As DGo0.18 eV is much lower than E a E3 eV in the glass state below 534 K, the observed Arrhenius behaviour shows that also in the melt-quenched state in memory cells the activation energy for diffusion controls the temperature dependence of the growth velocity 34,35 . It is also worth noting that we do not find sufficient evidence of a breakdown of the Stokes-Einstein relation between diffusivity and viscosity, which would introduce an exponent xo1 for the viscosity term Z in equation (1) 36 (Supplementary Note 5).…”
Section: Discussionmentioning
confidence: 99%
“…15). As DGo0.18 eV is much lower than E a E3 eV in the glass state below 534 K, the observed Arrhenius behaviour shows that also in the melt-quenched state in memory cells the activation energy for diffusion controls the temperature dependence of the growth velocity 34,35 . It is also worth noting that we do not find sufficient evidence of a breakdown of the Stokes-Einstein relation between diffusivity and viscosity, which would introduce an exponent xo1 for the viscosity term Z in equation (1) 36 (Supplementary Note 5).…”
Section: Discussionmentioning
confidence: 99%
“…As reported, 4,21 a ജ 0 and m = 0.5 for diffusion-controlled growth, while m = 1 for interfacecontrolled growth and the interface-controlled growth for GST has been proved. [10][11][12] Unfortunately, we cannot determinate whether N doping changes the type of the growth of GeSbTe. But if the type of growth was not changed, the value of m will still be 1.…”
Section: Methodsmentioning
confidence: 99%
“…The JMAK parameters such as Avrami coefficient, activation energy, etc. have been investigated mainly through microscope observation [10][11][12][13][14] or the optical measurement. 1-4 The resistivity measurement was also used to get information about the crystallization processes.…”
Section: Introductionmentioning
confidence: 99%
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“…Chalcongenide phase-change materials are extensively used as the optical and nonvolatile electrical data storage media due to the apparent difference in optical reflectivity and electrical resistivity between the crystalline and amorphous state [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17][18][19][20]. For optical data storage, the recording is achieved by forming amorphous marks on a crystalline base with a focused laser beam.…”
Section: Introductionmentioning
confidence: 99%