2019
DOI: 10.5599/jese.708
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Atomic layer deposited V2O5 coatings: a promising cathode for Li-ion batteries

Abstract: <p><span lang="EN-US">A modified, thermal atomic layer deposition process was employed for the pulsed chemical vapor deposition growth of vanadium pentoxide films using </span><span lang="EN-GB">t</span><span lang="EN-US">etrakis (dimethylamino) vanadium and water as a co-reagent.</span><span lang="EN-GB">Depositions were carried out at 350<sup>o</sup></span><span lang="EN-US">C for 400 pulsed CVD cycles, and samples were subsequently anne… Show more

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