Atomic Layer Deposition

Muneshwar, Triratna; Miao, Mengmeng; Borujeny, Elham Rafie; Cadien, Ken

doi:10.1016/b978-0-12-812311-9.00011-6

Cited by 18 publications

(3 citation statements)

References 75 publications

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“…In the latter case, there are quite a few methods followed in the literature, providing modification of the surface of the samples under study, either in the category of physical (e.g., sputtering, ion plating etc) or chemical (pyrolysis, plasma‐enhanced, etc) vapor deposition, 33–35 aiming to improve barrier properties and enhance antimicrobial activity. Among those, atomic layer deposition (ALD) was found to excel, mainly because it is based on sequential self‐limiting reactions, thus providing uniformity and conformality of the coating across the substrate area, combined with the ability for deposition at temperatures suitable for polymer substrates 36–40 . Up to date, only a handful of ALD deposited PLA‐based systems are considered in literature, which involve aluminum oxide (Al 2 O 3 ), 41–45 titanium oxide (TiO 2 ), 46 and zinc oxide (ZnO) 47,48 as the inorganic coating.…”

Section: Introductionmentioning

confidence: 99%

“…Among those, atomic layer deposition (ALD) was found to excel, mainly because it is based on sequential self-limiting reactions, thus providing uniformity and conformality of the coating across the substrate area, combined with the ability for deposition at temperatures suitable for polymer substrates. [36][37][38][39][40] Up to date, only a handful of ALD deposited PLA-based systems are considered in literature, which involve aluminum oxide (Al 2 O 3 ), [41][42][43][44][45] titanium oxide (TiO 2 ), 46 and zinc oxide (ZnO) 47,48 as the inorganic coating.…”

Section: Introductionmentioning

confidence: 99%

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Atomic layer deposition of ZnO on PLA/TiO₂ bionanocomposites: Evaluation of surface chemistry and physical properties toward food packaging applications

Barmpaki

Zavvou

Drivas

et al. 2023

J of Applied Polymer Sci

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The impact of titanium dioxide (TiO2) on the physical properties of poly(lactic acid) (PLA) is explored, along with the combined effect of Atomic Layer Deposition of zinc oxide (ZnO) on the nanocomposite films' surface. PLA/TiO2 bionanocomposites are prepared via melt‐extrusion and characterized in terms of their morphological, thermal, and mechanical properties. Homogeneous dispersion of the filler offers enhanced mechanical performance for samples up to 5 wt% in TiO2 content. Thermal stability of PLA is also slightly improved upon increasing TiO2 content. This work also demonstrates that surface modification of PLA/TiO2 films employing Atomic Layer Deposition of zinc oxide enhances hydrophobicity, while antimicrobial activity, although mild, appears enhanced for coated samples. Water vapor permeability is retained in both coated and uncoated nanocomposites. Surface characterization of the studied specimens, by x‐ray photoelectron spectroscopy and scanning electron microscopy, reveals subsurface diffusion and reaction of the depositing compounds within PLA, leading to a different surface chemistry involving Zn(OH)2. This study gives valuable insights on the parameters affecting the atomic layer deposition of inorganic coatings on a polymeric substrate in the presence of nanoinclusions and, therefore, on the physical properties of the coated films, providing the pathway for their exploitation in food packaging applications.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Atomic layer deposition of ZnO on PLA/TiO₂ bionanocomposites: Evaluation of surface chemistry and physical properties toward food packaging applications

Barmpaki

Zavvou

Drivas

et al. 2023

J of Applied Polymer Sci

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“…Several synthesis techniques to produce ZnO films include sol-gel [10], pulsed layer deposition [11], chemical bath deposition [12], radiofrequency magnetron sputtering [13], spray pyrolysis [14], and atomic layer deposition (ALD) [15]. ALD is a precise deposition technique particularly attractive, in which the growth process takes place in the gas phase, where a sequence of self-limited surface reactions are repeated a specific number of times [16]. Through this growth mechanism, this technique allows thickness control, which can be accurately manipulated since it depends on the number of deposition cycles.…”

Section: Introductionmentioning

confidence: 99%

Columnar nitrogen-doped ZnO nanostructured thin films obtained through atomic layer deposition

et al. 2021

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The present study was aimed to develop nitrogen-doped nanostructured ZnO thin films. These films were produced in a sequential procedure involving the atomic layer deposition technique, and a hydrothermal process supported by microwave heating. Employing the atomic layer deposition technique, through self-limited reactions of diethylzinc (DEZn) and H 2 O, carried out at 3.29×10 −4 atm and 190 °C, a high-quality ZnO seed was grown on a Si (100) substrate, producing a textured film. In a second stage, columnar ZnO nanostructures were grown perpendicularly oriented to the silicon substrate on those films, using a solvothermal process in a microwave heating facility, employing Zn(NO 3 ) 2 as zinc precursor, while hexamethylenetetramine (HMTA) was used to produce the bridging of Zn 2+ ions. The consequence of N-doping concentration on the physicochemical properties of ZnO thin films was studied. The manufactured films were structurally analyzed by scanning electron microscopy and x-ray diffraction. Also, x-ray photoelectron spectroscopy, Raman, and UV-vis spectroscopies were used to provide further insight on the effect of nitrogen doping. The N-doped films displayed textured wurtzite-like structures that changes their preferential growth from the (002) to the (100) crystallographic plane, apparently promoted by the increase of nitrogen precursor. It is also shown that nitrogen-doped films undergo a reduction in their bandgap, compared to ZnO. The methodology presented here provides a viable way to perform high-quality N-ZnO nanostructured thin films.

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Optoelectronic Gas Sensing Platforms: From Metal Oxide Lambda Sensors to Nanophotonic Metamaterials

Perkins

Gholipour

2021

Advanced Photonics Research

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Gas sensing technology platforms have allowed for the improvement of crucial industrial processes and the decreased emissions of environmentally harmful gases that have led to deleterious outcomes. Industries where gas control has become critical are petrochemical, refinery, food and beverage, and power generation. These industries utilize gases such as ethylene, sulfur, carbon dioxide (CO 2 ), and oxygen (O 2 ) to produce gasoline, carbonated beverages, and electricity. [1] During various processes, harmful gases such as carbon monoxide (CO), CO 2 , sulfur dioxide (SO 2 ), and nitrogen dioxide (NO 2 ) and volatile organic compounds (VOCs) such as ethanol (C 2 H 5 OH), acetone (CH 3 COCH 3 ), toluene (C 7 H 8 ), and acetylene (C 2 H 2 ) can be emitted. [2][3][4][5][6] The emission of these environmentally toxic gases and VOCs from both industrial processes and automobiles has been linked to the nitrous oxides (NO x ), CO, and hydrocarbon emissions responsible for acid rain in the 1960s. Legislation was introduced to address and mitigate this acidic precipitation and the emission of environmentally toxic gasses by requiring the use of gas sensors and catalytic converters. [2] Gas sensing technology can be found in two leading commercial platforms: electronic (lambda sensors) and optical (nondispersive infrared (NDIR) sensors and optrodes). Lambda sensors are made with electrolytes or gas-sensitive films that exploit the ionic conductivity of electrolytes or the adsorption of gases and bonding of hydroxyl groups on metal oxide (MO) materials. State-of-the-art, automotive lambda sensors, also known as "automotive oxygen sensors," use a solid yttria-stabilized zirconia (YSZ) electrolyte in wideband sensor design geometries. The wideband sensor design was adapted from the early narrowband YSZ sensor design that utilized a simple Nernst cell. The wideband sensor design offers improved sensor linearity when compared to the narrowband designs across a wide range of air-to-fuel ratio values. Though the electrolytic lambda sensors' physical design has changed in previous years, the sensor has not seen an improvement in terms of electrolytic materials.Lambda sensors have also been based on gas-sensitive oxide films, instead of electrolytes, that employ the use of MO materials. MO materials include a wide range of oxidized transitional metals. These MOs undergo electronic changes when gases or VOCs are chemisorbed or bound to hydroxyl groups on the material's surface, thereby increasing or decreasing the MO's resistivity. The gas-material interaction only occurs at high temperatures, called the "activation temperatures," required by the MO.High activation temperatures are common in both electrolytic and MO gas sensors. Bringing the electrolytic and MO gas sensors to these high temperatures requires electronic heater elements. The reduction of the activation temperature of a lambda sensor can be achieved by using promoter materials and catalytic metals. Some material platforms, such as metal-organic frameworks (MOFs), are als...

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Atomic Layer Deposition

Cited by 18 publications

References 75 publications

Atomic layer deposition of ZnO on PLA/TiO₂ bionanocomposites: Evaluation of surface chemistry and physical properties toward food packaging applications

Atomic layer deposition of ZnO on PLA/TiO₂ bionanocomposites: Evaluation of surface chemistry and physical properties toward food packaging applications

Columnar nitrogen-doped ZnO nanostructured thin films obtained through atomic layer deposition

Optoelectronic Gas Sensing Platforms: From Metal Oxide Lambda Sensors to Nanophotonic Metamaterials

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Atomic Layer Deposition

Cited by 18 publications

References 75 publications

Atomic layer deposition of ZnO on PLA/TiO2 bionanocomposites: Evaluation of surface chemistry and physical properties toward food packaging applications

Atomic layer deposition of ZnO on PLA/TiO2 bionanocomposites: Evaluation of surface chemistry and physical properties toward food packaging applications

Columnar nitrogen-doped ZnO nanostructured thin films obtained through atomic layer deposition

Optoelectronic Gas Sensing Platforms: From Metal Oxide Lambda Sensors to Nanophotonic Metamaterials

Contact Info

Product

Resources

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Atomic layer deposition of ZnO on PLA/TiO₂ bionanocomposites: Evaluation of surface chemistry and physical properties toward food packaging applications

Atomic layer deposition of ZnO on PLA/TiO₂ bionanocomposites: Evaluation of surface chemistry and physical properties toward food packaging applications