Atomic Layer Deposition of Insulating AlF3/Polyimide Nanolaminate Films

Li, Xinzhi; Vehkamäki, Marko; Heikkilä, Mikko; Mattinen, Miika; Putkonen, Matti; Leskelä, Markku; Ritala, Mikko

doi:10.3390/coatings11030355

Cited by 6 publications

(3 citation statements)

References 32 publications

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“…The imide bond forms in the as-deposited films without any additional thermal treatment, which indicates the ALD growth of the polyimide films. In recent years, polyimide ALD was applied to the deposition of functional nanolaminates, such as polyimide/Ta 2 O 5 34 , 35 and polyimide/AlF 3 36 . Based on a strategy for alternative nanolayer formation (Fig.…”

Section: Formation Of Polyimide Filmsmentioning

confidence: 99%

Microfabrication of functional polyimide films and microstructures for flexible MEMS applications

Dong

Shen

et al. 2023

Microsyst Nanoeng

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Polyimides are widely used in the MEMS and flexible electronics fields due to their combined physicochemical properties, including high thermal stability, mechanical strength, and chemical resistance values. In the past decade, rapid progress has been made in the microfabrication of polyimides. However, enabling technologies, such as laser-induced graphene on polyimide, photosensitive polyimide micropatterning, and 3D polyimide microstructure assembly, have not been reviewed from the perspective of polyimide microfabrication. The aims of this review are to systematically discuss polyimide microfabrication techniques, which cover film formation, material conversion, micropatterning, 3D microfabrication, and their applications. With an emphasis on polyimide-based flexible MEMS devices, we discuss the remaining technological challenges in polyimide fabrication and possible technological innovations in this field.

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Section: Formation Of Polyimide Filmsmentioning

confidence: 99%

Microfabrication of functional polyimide films and microstructures for flexible MEMS applications

Dong

Shen

et al. 2023

Microsyst Nanoeng

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show abstract

“…It is known that the use of aluminum fluoride in the AlF 3 /SiO 2 /Si system allows one to localize a high density of fixed negative charges in fluorine vacancies, serving as a source of a strong drift field [15]. AlF 3 /polyimide films increase dielectric permeability as well as reduce leakage currents compared to conventional polyimide films [16]. Interestingly, AlF 3 can also be used to prevent tooth discoloration [17].…”

Section: Introductionmentioning

confidence: 99%

Synthesis under Normal Conditions and Morphology and Composition of AlF3 Nanowires

Dautov,

Kotlyar,

Butusov

et al. 2023

Nanomaterials

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AlF3 has interesting electrophysical properties, due to which the material is promising for applications in supercapacitors, UV coatings with low refractive index, excimer laser mirrors, and photolithography. The formation of AlF3-based nano- and micro-wires can bring new functionalities to AlF3 material. AlF3 nanowires are used, for example, in functionally modified microprobes for a scanning probe microscope. In this work, we investigate the AlF3 samples obtained by the reaction of initial aluminum with an aqueous hydrofluoric acid solution of different concentrations. The peculiarity of our work is that the presented method for the synthesis of AlF3 and one-dimensional structures based on AlF3 is simple to perform and does not require any additional precursors or costs related to the additional source materials. All the samples were obtained under normal conditions. The morphology of the nanowire samples is studied using scanning electron microscopy. We performed an intermediate atomic force microscope analysis of dissolved Al samples to analyze the reactions occurring on the metal surface. The surface of the obtained samples was analyzed using a scanning electron microscope. During the analysis, it was found that under the given conditions, whiskers were synthesized. The scale of one-dimensional structures varies depending on the given parameters in the system. Quantitative energy-dispersive x-ray spectroscopy spectra are obtained and analyzed with respect to the feedstock and each other.

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“…It is also a promising candidate for fiber lasers in the mid-infrared region [15]. AlF3/polyimide films increase dielectric permeability as well as reduce leakage currents compared to conventional polyimide films [16]. Interestingly, AlF3 can also be used to prevent tooth discoloration [17].…”

Section: Introductionmentioning

confidence: 99%

Synthesis under Normal Conditions, Morphology and Composition of AlF3 Nanowires

Dautov,

Kotlyar,

Butusov

et al. 2023

Preprint

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: AlF3 has interesting electrophysical parameters, due to which the material is promising for applications in supercapacitors, UV coatings with low refractive index, excimer laser mirrors, and photolithography. The formation of AlF3-based nano- and micro-wires can bring new functionalities to AlF3 material. AlF3 nanowires be used, for example, in functionally modified microprobes for scanning probe microscopy. In this work, we investigate the AlF3 samples obtained by the reaction of initial aluminum with aqueous hydrofluoric acid solution of different concentrations. All the samples were obtained under normal conditions. The morphology of the nanowire samples is studied by scanning electron microscopy. Quantitative energy-dispersive x-ray spectroscopy (EDS) spectra are obtained and analyzed with respect to the feedstock and each other.

show abstract

Atomic Layer Deposition of Insulating AlF3/Polyimide Nanolaminate Films

Cited by 6 publications

References 32 publications

Microfabrication of functional polyimide films and microstructures for flexible MEMS applications

Microfabrication of functional polyimide films and microstructures for flexible MEMS applications

Synthesis under Normal Conditions and Morphology and Composition of AlF3 Nanowires

Synthesis under Normal Conditions, Morphology and Composition of AlF3 Nanowires

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