2022
DOI: 10.1016/j.corsci.2022.110773
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Atomic layer deposition of nanometric alumina for corrosion protection of heterogeneous metallic surfaces – The case of aeronautical grade aluminium alloy 2024-T3

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Cited by 6 publications
(2 citation statements)
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“…Nowadays, ALD is widely used in the industry for the deposition of metal and metal nitride films (Al, Ti, AlN, TiN) and the deposition of dielectric thin films (HfO 2 , ZrO 2 , and Al 2 O 3 ) [32][33][34][35][36]. The coatings deposited by ALD provide new applications in diverse areas of corrosion [37] because a thin ALD film serves as an efficient barrier protection against gases [38,39] and liquids [36,40]. Up to now, the most frequently used ALD corrosion protection coating has been Al 2 O 3 , which is usually deposited from trimethyl aluminium (Al(CH) 3 ) and water [39,[41][42][43][44] at temperatures ranging from 33 to 500 • C [37,[45][46][47].…”
Section: Introductionmentioning
confidence: 99%
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“…Nowadays, ALD is widely used in the industry for the deposition of metal and metal nitride films (Al, Ti, AlN, TiN) and the deposition of dielectric thin films (HfO 2 , ZrO 2 , and Al 2 O 3 ) [32][33][34][35][36]. The coatings deposited by ALD provide new applications in diverse areas of corrosion [37] because a thin ALD film serves as an efficient barrier protection against gases [38,39] and liquids [36,40]. Up to now, the most frequently used ALD corrosion protection coating has been Al 2 O 3 , which is usually deposited from trimethyl aluminium (Al(CH) 3 ) and water [39,[41][42][43][44] at temperatures ranging from 33 to 500 • C [37,[45][46][47].…”
Section: Introductionmentioning
confidence: 99%
“…Ultra-thin Al 2 O 3 films have been reported to efficiently protect various metals, such as steel [47][48][49][50], copper [51,52], and aluminium and its alloys [40,47]. In addition to depositing individual films, ALD is also used as a sealing method to block the pinholes in hard coatings prepared via physical and chemical vapour deposition (PVD and CVD) [37,53] and anodised aluminium [54].…”
Section: Introductionmentioning
confidence: 99%