2020
DOI: 10.1116/1.5134743
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Atomic layer deposition of Nb-doped TiO2: Dopant incorporation and effect of annealing

Abstract: DOI to the publisher's website.• The final author version and the galley proof are versions of the publication after peer review.• The final published version features the final layout of the paper including the volume, issue and page numbers. Link to publication General rightsCopyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners and it is a condition of accessing publications that users recognise and abide by the legal re… Show more

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Cited by 17 publications
(5 citation statements)
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“…In 2005, Furubayashi et al [6] prepared Nb-doped anatase TiO 2 (TNO) films on a SrTiO 3 substrate by pulsed laser deposition (PLD) method, the excellent resistivity (2∼3×10 −4 Ω cm) and visible transmittance (>90%) of the innovated film are comparable to that of typical TCOs. Subsequently, other researchers studied the properties of TNO films created by different preparation methods [7][8][9][10][11][12]. TNO is expected to become the next generation of innovated TCO material.…”
Section: Introductionmentioning
confidence: 99%
“…In 2005, Furubayashi et al [6] prepared Nb-doped anatase TiO 2 (TNO) films on a SrTiO 3 substrate by pulsed laser deposition (PLD) method, the excellent resistivity (2∼3×10 −4 Ω cm) and visible transmittance (>90%) of the innovated film are comparable to that of typical TCOs. Subsequently, other researchers studied the properties of TNO films created by different preparation methods [7][8][9][10][11][12]. TNO is expected to become the next generation of innovated TCO material.…”
Section: Introductionmentioning
confidence: 99%
“…Compared with that of undoped TiO 2 , the Raman characteristic peak position of Ti–Nb–O nanotubes had almost no change, but the intensity was decreased. This could be explained by the decrease of crystallinity caused by Nb doping since entering Nb 5+ into the TiO 2 lattice could decrease the grain size and cause lattice distortion to some extent. On the other hand, V O /Ti–Nb–O nanotubes showed a further decrease in Raman characteristic peak intensity and an increase in the full width at half maximum. Raman peaks of V O /Ti–Nb–O exhibited a blue shift, a decrease in intensity, and an increase in the half-height width, which was due to the vibration of the crystal structure and the non-metrological effect caused by oxygen vacancies. , …”
Section: Resultsmentioning
confidence: 99%
“…Comparing n‐ and p‐type TMOs, it appears that extrinsic n‐type doping of TMOs is much more readily available than for p‐type materials, with a wide library of available n‐type dopants such as Al, B, Ga and H for ZnO, Sn, Zn, W, Zr and H for In 2 O 3 and Nb and Ta for TiO 2‐x. 87,92,313–318 Also, as can be clearly seen in Figure 9C) many of the TMO electron contacts such as TiO 2‐x , Nb 2 O 5‐x and ZnO have been found to give good surface passivation to c ‐Si surfaces 81,83,319,320 . This contrasts from most hole‐selective TMOs which often require a dedicated a‐Si:H passivation layer 82,190,321 .…”
Section: Transition Metal Oxidesmentioning
confidence: 98%