2020
DOI: 10.1016/j.apsusc.2020.146349
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Atomic layer deposition of titanium oxide and nitride on vertically aligned carbon nanotubes for energy dense 3D microsupercapacitors

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Cited by 15 publications
(9 citation statements)
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“…In contrast, during the nitridation process, there could be a large number of O atoms replaced with N atoms, which thereby promotes the formation of a substantial number of Ti–N lattices leading to the crystallization of titanium nitride in the host-TiO 2 system . Notably, this in situ formation of Ti–N often leads to the formation of a cubic-TiN, since it is one of the most thermodynamically stable crystal structures of TiN phase to be formed in the lattices of the host-TiO 2 . , Based on these insights, a plausible crystal structure of the Ti-oxynitride phase is depicted in Figure c. Notably, the obtained refinement structural parameters associated with lattice constants, bond length, and bond angle of Ti–O and Ti–N in the tetragonal TiO 2 anatase phase and cubic TiN phase are consistent with the literature-reported values (see Table S1).…”
Section: Resultsmentioning
confidence: 99%
“…In contrast, during the nitridation process, there could be a large number of O atoms replaced with N atoms, which thereby promotes the formation of a substantial number of Ti–N lattices leading to the crystallization of titanium nitride in the host-TiO 2 system . Notably, this in situ formation of Ti–N often leads to the formation of a cubic-TiN, since it is one of the most thermodynamically stable crystal structures of TiN phase to be formed in the lattices of the host-TiO 2 . , Based on these insights, a plausible crystal structure of the Ti-oxynitride phase is depicted in Figure c. Notably, the obtained refinement structural parameters associated with lattice constants, bond length, and bond angle of Ti–O and Ti–N in the tetragonal TiO 2 anatase phase and cubic TiN phase are consistent with the literature-reported values (see Table S1).…”
Section: Resultsmentioning
confidence: 99%
“…The newly prepared MWCNTs/FeNi 3 /PANI ternary composites have high specific capacitance (398.1 F/g), large energy and power density (9.1 and 500 W/kg, respectively), and good cycle performance (80.9% capacity retention after 2000 charge–discharge cycles). Zhang et al 149 developed a simple fabrication method of symmetrical TiN‐TiO 2 ‐VACNT 3D micro supercapacitor device synthesized by atomic layer deposition (ALD). Among them, atomic layer deposition (ALD) is used to deposit conformal pseudocapacitive coatings of titanium oxide (TiO 2 ) and titanium nitride (TiN) onto vertically aligned carbon nanotubes (VACNT) grown by CVD.…”
Section: Ternary Complexmentioning
confidence: 99%
“…The fabrication process for the VACNT MSC devices was described in detail in a previous study . Two interdigitated electrodes (IDEs) consisted of five fingers each, totaling 10 interdigital fingers for the 3D MSC device.…”
Section: Methodsmentioning
confidence: 99%
“…The fabrication process for the VACNT MSC devices was described in detail in a previous study. 25 Two interdigitated electrodes (IDEs) consisted of five fingers each, totaling 10 interdigital fingers for the 3D MSC device. The dimension of each finger is 0.5 mm by 4.5 mm, and the interdigitated spacing between the fingers is 0.5 mm.…”
Section: Methodsmentioning
confidence: 99%