Atomic layer deposition of zirconium oxide thin films

Abstract

Abstract

Flexible to rigid: IR spectroscopic investigation of a rhenium-tricarbonyl-complex at a buried interface

“…With increasing coverage the response of the system should transition from rather flexible to very rigid at a cover layer thickness that corresponds to the height of the molecules on the surface. The thickness of one ALD cycle is about 1 Å, 22,23 while the height of the molecule is E9 Å, as estimated from a published crystal structure of a similar complex. 24 Thus, we expect the transition to happen with 10 ALD cycles, and furthermore, that the transition will be relatively abrupt.…”

Molecular Layer Deposition of Crosslinked Polymeric Lithicone for Superior Lithium Metal Anodes

“…We controlled the MLD cycles to achieve a desirable film thickness. We measured the growth of these MLD processes using an in situ QCM [24,25]. To establish a repeatable uniform starting surface, we predeposited an Al 2 O 3 surface on the QCM crystals using ALD (inset of ), prior to performing the QCM measurements of the three MLD processes.…”

Atomic layer deposition of lithium zirconium oxides for the improved performance of lithium-ion batteries

“…In the ALD experiments, we utilized a commercial ALD reactor (Savannah 200, Cambridge Nanotech Inc., Cambridge, MA). 16,17,31 LZO films were prepared by combining two individual sub-ALD processes of LiOH and ZrO 2 . The LiOH sub-cycle consisted of two alternative doses, LTB (98%, Strem Chemicals, Inc., USA) and deionized H 2 O. ZrO 2 ALD was performed with two alternative doses, tetrakis(dimethylamido)zirconium(IV) (TDMA-Zr) and deionized H 2 O.…”

“…Previously, we have studied ALD-ZrO 2 . 31 In this study, we again measured ALD ZrO 2 using the timing sequence of 0.03 s TDMA-Zr -60 s purge -0.015 s H 2 O -60 s purge at 225 °C. As shown in Fig.…”

“…LiOH and ZrO 2 sub-ALD processes have been reported previously. [31][32][33][34] In this study, we focused on clarifying the growth characteristics of ALD LZOs at different ALD parameters and their effects on the performance of NMC622 electrodes. We found that the growth of the proposed LZO super-ALD processes was subject to the hygroscopic nature of the LiOH sub-ALD.…”