Atomic-scale characterization of subsurface damage and structural changes of single-crystal silicon carbide subjected to electrical discharge machining

Tan, Tsong Han; Yan, Jiwang

doi:10.1016/j.actamat.2016.10.045

Cited by 48 publications

(16 citation statements)

References 45 publications

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“…Step 5: The criterion information (Cj) is calculated by multiplicative formulae of Equations (13) and (14).…”

Section: Criteria Importance Through Criteria Inter-correlation (Critic)mentioning

confidence: 99%

“…Table 12 shows the computed normalized output values using Equation 12, of all L18 experiments. Table 12 also presents the standard deviation values associated with each quality characteristic estimated using Equation (13). The correlation coefficient of each criterion is determined using Equation (14).…”

Section: Principal Component Analysismentioning

confidence: 99%

“…The electrical discharge machining (EDM) process has proven its effectiveness to generate complex profiles even for hard and brittle materials with fewer heat-affected zones and dimensional inaccuracies [11][12][13][14]. Performance characteristics (material removal rate (MRR), tool wear rate (TWR), and surface roughness (SR)) are influenced significantly by the variables, namely peak current, discharge energy, electrode material, dielectric fluid, plus on time, and other process parameters [15,16].…”

Section: Introductionmentioning

confidence: 99%

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Experimental Analysis and Optimization of EDM Parameters on HcHcr Steel in Context with Different Electrodes and Dielectric Fluids Using Hybrid Taguchi-Based PCA-Utility and CRITIC-Utility Approaches

Chandrashekarappa

Kumar

Pimenov

et al. 2021

Metals

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Industries demand stringent requirements towards economical machining without hindering the surface quality while cutting high carbon high chromium (HcHcr) steel. Electrical discharge machining (EDM) of HcHcr steel aims at reducing machining cost (i.e., maximize material removal rate (MRR) and minimize tool wear rate (TWR)) with good surface quality (i.e., minimize surface roughness (SR)). A comparative study was carried out on EDM of HcHcr D2 steel (DIN EN ISO 4957) by applying Taguchi L18 experimental design considering different electrode materials (copper, graphite, and brass), dielectric fluids (distilled water and kerosene), peak current, and pulse-on-time. The process performances were analyzed with respect to material removal rate, surface roughness, and tool wear rate. Pareto analysis of variance was employed to estimate the significance of the process variables and their optimal levels for achieving lower SR and TWR and higher MRR. Hybrid Taguchi-CRITIC-Utility and Taguchi-PCA-Utility methods were implemented to determine the optimal EDM parameters. Higher MRR of 0.0632 g/min and lower SR of 1.68 µm and TWR of 0.012 g/min was attained by graphite electrode in presence of distilled water as dielectric fluid compared to the brass and copper. Additionally, a metallographic analysis was carried out to study the surface integrity on the machined surfaces. Micrographic analysis of the optimal conditions showed lower surface roughness and fewer imperfections (lesser impression, waviness surface, and micro-cracks) compared to worst conditions.

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“…Step 5: The criterion information (Cj) is calculated by multiplicative formulae of Equations (13) and (14).…”

Section: Criteria Importance Through Criteria Inter-correlation (Critic)mentioning

confidence: 99%

Section: Principal Component Analysismentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Experimental Analysis and Optimization of EDM Parameters on HcHcr Steel in Context with Different Electrodes and Dielectric Fluids Using Hybrid Taguchi-Based PCA-Utility and CRITIC-Utility Approaches

Chandrashekarappa

Kumar

Pimenov

et al. 2021

Metals

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“…When the micro-bulge is in the plastic deformation stage, according to studies of Majumdar [ 36 ], the force received by the micro-bulge in the plastic deformation stage is related to the hardness and the contact area. At this time, the relationship between the contact area ratio k and the pressure P is:

…”

Section: Adhesion Mechanism Of Lscmentioning

confidence: 99%

The Mechanism of Layer Stacked Clamping (LSC) for Polishing Ultra-Thin Sapphire Wafer

et al. 2020

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Double-sides polishing technology has the advantages of high flatness and parallelism, and high polishing efficiency. It is the preferred polishing method for the preparation of ultra-thin sapphire wafer. However, the clamping method is a fundamental problem which is currently difficult to solve. In this paper, a layer stacked clamping (LSC) method of ultra-thin sapphire wafer which was used on double-sides processing was proposed and the clamping mechanism of layer stacked clamping (LSC) was studied. Based on the rough surface contact model of fractal theory, combining the theory of van der Waals force and capillary force, the adhesion model of the rough surfaces was constructed, and the reliability of the model was verified through experiments. Research has found that after displacement between the two surfaces the main force of the adhesion force is capillary force. The capillary force decreases with the increasing of surface roughness, droplet volume, and contact angle. For an ultra-thin sapphire wafer with a diameter of 50.8 mm and a thickness of 0.17 mm, more than 1.4 N of normal adhesion force can be generated through the LSC method. Through the double-sides polishing experiment using the LSC method, an ultra-thin sapphire wafer with an average surface roughness (Ra) of 1.52 nm and a flatness (PV) of 0.968 μm was obtained.

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“…According to Ulutan and Tan [3,4], a typical characteristic of titanium alloy machined surface consists mainly of three parts: surface white layer, subsurface plastic deformation zone and bulk material. In previous studies, surface white layer states for processed components have attracted substantial efforts in academic and application field [5,6].…”

Section: Introductionmentioning

confidence: 99%

The influence of cutting parameters on the defect structure of subsurface in orthogonal cutting of titanium alloy

Bai

Tong

et al. 2017

J. Mater. Res.

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Atomic-scale characterization of subsurface damage and structural changes of single-crystal silicon carbide subjected to electrical discharge machining

Cited by 48 publications

References 45 publications

Experimental Analysis and Optimization of EDM Parameters on HcHcr Steel in Context with Different Electrodes and Dielectric Fluids Using Hybrid Taguchi-Based PCA-Utility and CRITIC-Utility Approaches

Experimental Analysis and Optimization of EDM Parameters on HcHcr Steel in Context with Different Electrodes and Dielectric Fluids Using Hybrid Taguchi-Based PCA-Utility and CRITIC-Utility Approaches

The Mechanism of Layer Stacked Clamping (LSC) for Polishing Ultra-Thin Sapphire Wafer

The influence of cutting parameters on the defect structure of subsurface in orthogonal cutting of titanium alloy

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