1995
DOI: 10.1016/s0007-8506(07)62362-2
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Atomic-Scale Precision Motion Control Stage (The Angstrom Stage)

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Cited by 28 publications
(6 citation statements)
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“…As an example, ultra-precision positioning systems with 1 nm positional resolution are developed by Otsuka et al [126]. A magnetic bearing based stage of 0.1 nm resolution is developed by Holmes et al [127]. A 25 pm positioning resolution system is developed by Mizumoto et al [128,129] using twist roller drive and aerostatic guide way.…”
Section: Micro Componentsmentioning
confidence: 99%
“…As an example, ultra-precision positioning systems with 1 nm positional resolution are developed by Otsuka et al [126]. A magnetic bearing based stage of 0.1 nm resolution is developed by Holmes et al [127]. A 25 pm positioning resolution system is developed by Mizumoto et al [128,129] using twist roller drive and aerostatic guide way.…”
Section: Micro Componentsmentioning
confidence: 99%
“…AFM is favoured over STM, in which the probe tip can push, pull and slide molecules into position. The use of magnetic bearings to isolate the system from disturbances is key to nanometre positioning precision [217]. Scanning probe microscopy achieves nanoparticle manipulation but has low throughput.…”
Section: Prospects For Micro-/nanomanufacturingmentioning
confidence: 99%
“…Case Study 19. Nanomanipulator systems [27] A fundamental requirement for both laboratory sample analysis and processing, as well as industrial fabrication of nanostructures requiring precision alignment and registration, is nanoscale positioning and orientation by a nanomanipulator system (Fig. 23).…”
Section: Nanomanufacturing Case Studiesmentioning
confidence: 99%