Medium-energy ion scattering ͑MEIS͒ has been used to determine the atomic structure of two-dimensional ͑2D͒ rare-earth silicides on Si͑111͒. In the case of the Si͑111͒1ϫ1-Er 2D silicide surface, the MEIS results refine previously published results, but in the case of the Si͑111͒1ϫ1-Ho surface, this work represents to our knowledge the first full quantitative structural analysis that reveals a structure similar to that of the Si͑111͒1 ϫ1-Er surface and directly supports a model in which a rare-earth monolayer resides below a Si bilayer close to bulklike termination.