Attosecond metrology in a continuous-beam transmission electron microscope

Ryabov, Andrey; Thurner, Johannes W.; Nabben, D.; Tsarev, M. V.; Baum, Peter

doi:10.1126/sciadv.abb1393

Cited by 64 publications

(47 citation statements)

References 54 publications

(121 reference statements)

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“…The reported polarization‐tunable and regularly distributed optical field enhancements might also serve for plasmon‐enhanced Raman spectroscopy, [ 65 ] facilitate the optical sensing of low amount of substances [ 65,66 ] or localize photocatalytic activity to desired regions in space with nanometer precision. Experimental investigations of spatiotemporal near‐fields with attosecond electron microscopy [ 67 ] or Aharonov‐Bohm diffraction [ 68 ] might provide further insight, in particular on the role of round edges and imperfections, but the reported proof‐of‐concept simulations already show that regular or semiregular nanoparticle arrays under symmetry control with ligand chemistry might be a useful tool for creating nanophotonic functionality with a scalable synthesis approach.…”

Section: Resultsmentioning

confidence: 99%

Ligand‐Programmed Consecutive Symmetry Break(s) in Nanoparticle Based Materials Showing Emergent Phenomena: Transitioning from Sixfold to Threefold Symmetry in Anisotropic ZnO Colloids

Theiß

Voggel

Kuper

et al. 2020

Adv Funct Materials

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The central promise of nanoparticle‐based materials is that cooperative properties may emerge, when individual quantum dots are positioned on a periodic lattice. Yet, there are only a few papers in the literature reporting such effects. Nevertheless, it is clear that the symmetry of the superlattice is decisive for the desired emergent phenomena. An interesting question is, how the symmetry of the initial monodisperse nanoparticles affects the structure of the colloidal crystal during self‐assembly processes. For instance, particles with a hexagonal cross‐section demonstrate self‐organization, which is very similar to spherical colloids. Likewise, one would also expect that trigonal nanoparticles behave similarly. Unfortunately, it is very hard to obtain monodisperse semiconductor colloids with a trigonal shape, because this requires a symmetry break during morphogenesis of the nanocrystal. While such a symmetry break is known in the literature for structures attached to a solid substrate, herein, colloidal synthesis of trigonal ZnO nanorods is successfully demonstrated, and the mechanism is elucidated via experimental and theoretical methods. 2D‐superlattices formed by such particles with trigonal cross‐section are compared to hexagonal analogues. It is found that there are distinct differences, which result in important differences in properties such as the formation of voids and also in optical properties.

show abstract

Section: Resultsmentioning

confidence: 99%

Ligand‐Programmed Consecutive Symmetry Break(s) in Nanoparticle Based Materials Showing Emergent Phenomena: Transitioning from Sixfold to Threefold Symmetry in Anisotropic ZnO Colloids

Theiß

Voggel

Kuper

et al. 2020

Adv Funct Materials

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show abstract

“…The pulses arrive at the target at almost the full average brightness of the electron source and in synchrony to the optical cycles. 240 EUV lithography is currently being used for HVM at the 7-and 5-nm node. This new lithography method will reduce the manufacturing complexity since it enables the return to the use of single exposure method to pattern the critical layers.…”

Section: Ltemmentioning

confidence: 99%

Review of THz-based semiconductor assurance

True

Jessurun

et al. 2021

Opt. Eng.

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Terahertz radiation for inspection and fault detection has been of interest for the semiconductor industry since the first generation and detection of THz signals. Until recent hardware advances, THz systems lacked the signal quality and reliability for use as an effective nondestructive testing (NDT) method. Incremental advances in THz sources, detectors, and signal processing resulted in the successful applied-industrial use of THz NDT techniques on carbon fiber laminates, automotive coatings, and for detection of counterfeit pharmaceutical tablets. Semiconductor inspection and verification methods ensure the functionality and thereby safety of vital electronics for several critical industries. For this reason, the reliability and verification of a THz NDT method must exceed currently used inspection systems. With recent laboratory access to THz radiation, THz inspection methods are often compared with existing optical, electrical, and volumetric semiconductor verification techniques for their production monitoring and failure analysis viability. This review will cover THz techniques and their applications at the printed circuit board (PCB), integrated circuit (IC), and transistor/gate scales. The THz radiation gap spans between optical and electronic ranges with a millimeter-sized wavelength allowing for adequate penetration of plastic and ceramic and semiconductor materials. THz radiation can be used to determine structural features, electrical signatures in the THz range, and chemical information simultaneously. Cost and environmental limitations restricted the ability for THz NDT semiconductor inspection methods to escape the lab and succeed in the dynamic environment of a semiconductor fabrication environment. Hybridized metrology methods incorporating information from multiple inspection tools are a regime where THz spectral and structural data can be combined with existing methods such as optical, x-ray, or E-beam. THz can be used initially to offer support to the complex failure analysis and verification requirements of the semiconductor industry from nanoscale to macroscale features and components. For THz systems to become independent inspection tools used for semiconductor production monitoring, in the lab or fab, this will require a confident level of statistical process control for THz signal generation, detection, or processing. Applied industrial semiconductor device inspection will likely be a result of a combination of research into THz hardware, reconstruction techniques, and the widespread application of machine learning techniques. Many breakthroughs occurred over the years to enable successful nondestructive characterization and inspection of semiconductor devices from the nanoscale transistors to fully packaged integrated circuits and assembled PCBs.

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“…The reported polarization-tunable and regularly distributed optical field enhancements might also serve for plasmon-enhanced Raman spectroscopy, [63] facilitate the optical sensing of low amount of substances [63][64] or localize photocatalytic activity to desired regions in space with nanometre precision. Experimental investigations of spatiotemporal near-fields with attosecond electron microscopy [65] or Aharonov-Bohm diffraction [66] might provide further insight, in particular on the role of round edges and imperfections, but the reported proof-ofconcept simulations already show that regular or semi-regular nanoparticle arrays under symmetry control with ligand chemistry might be a useful for creating nanophotonic functionality with a scalable synthesis approach.…”

Section: Cooperative Optical Propertiesmentioning

confidence: 99%

Ligand-Programmed Consecutive Symmetry Break(s) in Nanoparticle Based Materials Showing Emergent Phenomena: Transitioning from Six-Fold to Three-Fold Symmetry in Anisotropic ZnO Colloids

Theiß¹,

Voggel²,

Kuper³

et al. 2020

Preprint

View full text Add to dashboard Cite

The central promise of nanoparticle-based materials is that cooperative properties may emerge, when individual quantum dots are positioned on a periodic lattice. Yet, there are only few papers in literature reporting about such effects. Nevertheless, it is clear that the symmetry of the superlattice is decisive for the desired emergent phenomena. An interesting question is, how the symmetry of the initial monodisperse nanoparticles affects the structure of the colloidal crystal during self-assembly processes. For instance, particles with hexagonal cross-section show self-organization which is very similar to spherical colloids. Like-wise one would also expect that trigonal nanoparticles behave similar. Unfortunately, it is very hard to obtain monodisperse semiconductur colloids with trigonal shape, because this requires a symmetry break during morphogenesis of the nanocrystal. While such a symmetry-break is known in literature for structures attached to a solid substrate, it is shown here, colloidal synthesis of trigonal ZnO nanorods is successful, and the mechanism is elucidated by experimental and theoretical methods. 2D-superlattices formed by such particles with trigonal cross-section were compared to hexagonal analogues. It was found, there are distinct differences, which result in important differences in properties such as the formation of voids and also in optical properties.

show abstract

Attosecond metrology in a continuous-beam transmission electron microscope

Cited by 64 publications

References 54 publications

Ligand‐Programmed Consecutive Symmetry Break(s) in Nanoparticle Based Materials Showing Emergent Phenomena: Transitioning from Sixfold to Threefold Symmetry in Anisotropic ZnO Colloids

Ligand‐Programmed Consecutive Symmetry Break(s) in Nanoparticle Based Materials Showing Emergent Phenomena: Transitioning from Sixfold to Threefold Symmetry in Anisotropic ZnO Colloids

Review of THz-based semiconductor assurance

Ligand-Programmed Consecutive Symmetry Break(s) in Nanoparticle Based Materials Showing Emergent Phenomena: Transitioning from Six-Fold to Three-Fold Symmetry in Anisotropic ZnO Colloids

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