AUGER ANALYSIS COUPLED WITH CAPACITANCE STUDIES OF THE Si-SiO2 INTERFACE

Hirose, Masataka; Sakano, Shota; Ôsaka, Yukio; Hattori, Takeaki

doi:10.1016/b978-0-08-025969-7.50053-1

The Physics of MOS Insulators 1980

DOI: 10.1016/b978-0-08-025969-7.50053-1

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AUGER ANALYSIS COUPLED WITH CAPACITANCE STUDIES OF THE Si-SiO2 INTERFACE

Masataka Hirose

Shota Sakano

Yukio Ôsaka

et al.

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AUGER ANALYSIS COUPLED WITH CAPACITANCE STUDIES OF THE Si-SiO2 INTERFACE

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