1994
DOI: 10.1002/sia.7402201123
|View full text |Cite
|
Sign up to set email alerts
|

Auger imaging from rough, chemically inhomogenous, materials

Abstract: Surface analysis of practical materials often presents a challenging situation in Auger spectroscopy and imaging because the yield of Auger electrons depends not only on the composition of the surface but also upon the local surface inclination (the topography) and the composition of the material below the surface. The use of simultaneous imaging of the same area of a sample with an electron spectrometer and four quadrants of a backscattered electron (BSE) detector has been demonstrated previously to be very u… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

0
0
0

Year Published

1995
1995
2005
2005

Publication Types

Select...
4

Relationship

0
4

Authors

Journals

citations
Cited by 4 publications
references
References 6 publications
0
0
0
Order By: Relevance