Automatic generation of a 3-D solid model of a microfabricated structure

Harris, Regina M.; Maseeh, Fariborz; Senturia, S.D.

doi:10.1109/solsen.1990.109815

Cited by 17 publications

(2 citation statements)

References 9 publications

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“…Mechanical modeling is often first employed when designing a micromachined device. Traditional mechanical computer modeling software such as ANSYS [16], ABAQUSCS, or NASTRAN is used, as are MEMS-specific programs such as IntelliCAD, Anise, MEMCAD, and SENSIM [17]- [19]. Mechanical modeling is utilized to determine the structural stability of a device as well as to determine the resonant frequency and response to stress.…”

Section: Modeling Techniquesmentioning

confidence: 99%

“…As in the case of integrated circuits, the process fabrication model can be linked to the electrical model of any circuit elements used by the microdevice. Just as IC simulation programs have been linked together, MEMS simulation software that joins mechanical process and electrical design has also been developed [17]- [19]. Extensive experimental work is required to optimize the accuracy of any model with results obtained in the factory.…”

Section: Modeling Techniquesmentioning

confidence: 99%

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Application of MEMS technology in automotive sensors and actuators

1998

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The design of sensors and actuators has increasingly made use of microelectromechanical systems (MEMS) technology. This technology is well suited to producing a class of micromachined sensors and actuators that combines signal processing and communications on a single silicon chip or contained within the same package. This paper contains a discussion of the issues in producing MEMS sensors and actuators from the concept selection stage to the manufacturing platform. Examples of commercial and emerging automotive sensors and actuators are given, which illustrate the various aspects of device development. Future trends in MEMS technology as applied to automotive components are also discussed.

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Section: Modeling Techniquesmentioning

confidence: 99%

Section: Modeling Techniquesmentioning

confidence: 99%