Automatic statistical determination of dislocation density in production SOI substrates

Allen, L.P.; Genis, A. P.; Jacobs, Christopher B.; Allen, Steven; Snorrason, Magnus; Zacharias, Geevar C.

doi:10.1109/soi.1995.526446

1995 IEEE International SOI Conference Proceedings

DOI: 10.1109/soi.1995.526446

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Automatic statistical determination of dislocation density in production SOI substrates

L.P. Allen

A. P. Genis

Christopher B. Jacobs

et al.

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Automatic statistical determination of dislocation density in production SOI substrates

Cited by 0 publications

References 2 publications

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