“…Three-dimensional assembly induced by thin-film residual stresses uses mismatches in mechanical strains of stacked thin films (e.g., Si x N y , ZnO, TiO 2 , Al 2 O 3 , GaAs, Cr, vanadium dioxide (VO 2 ), germanium (Ge)). ,, Such multilayers can be prepared on substrates with sacrificial layers that, upon their removal, lead to self-rolling to form tubular, scroll-like, or polyhedral geometries. This process can transform microfabricated 2D electronic structures into 3D geometries for various applications (e.g., energy, , optoelectronics, , electronics, ,− biological studies − ). Thin, tubular SiNM-based photodetectors exhibit 1000 times enhancements in photoresponsivity compared to 2D devices due to light-trapping effects.…”