Autoparametric optical drive for micromechanical oscillators

Zalalutdinov, Maxim; Zehnder, Alan T.; Olkhovets, A.; Turner, Stephen W.; Šekarić, L.; Ilić, B.; Czaplewski, D.; Parpia, J. M.; Craighead, Harold G.

doi:10.1063/1.1388869

Cited by 95 publications

(70 citation statements)

References 14 publications

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“…Clever designs making use of these non-linearities enable parametric amplification [21,22], and parametric drive [23]. In particular, non-linear dampings [24] permit the realization of a mechanical Van der Pol oscillator [25].…”

Section: Introductionmentioning

confidence: 99%

Addressing geometric nonlinearities with cantilever microelectromechanical systems: Beyond the Duffing model

2010

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We report on low temperature measurements performed on micro-electro-mechanical systems (MEMS) driven deeply into the non-linear regime. The materials are kept in their elastic domain, while the observed non-linearity is purely of geometrical origin. Two techniques are used, harmonic drive and free decay. For each case, we present an analytic theory fitting the data. The harmonic drive is fit with a Lorentz-like lineshape obtained from an extended version of Landau and Lifshitz's non-linear theory. The evolution in the time domain is fit with an amplitude-dependent frequency decaying function derived from the Lindstedt-Poincaré theory of non-linear differential equations. The technique is perfectly generic and can be straightforwardly adapted to any mechanical device made of ideally elastic constituents, and which can be reduced to a single degree of freedom, for an experimental definition of its non-linear dynamics equation.

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Section: Introductionmentioning

confidence: 99%

Addressing geometric nonlinearities with cantilever microelectromechanical systems: Beyond the Duffing model

2010

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“…͓DOI: 10.1063/1.1622792͔ High-frequency microelectromechanical systems ͑MEMS͒ are widely considered as an element base for signal processing in the next generation of wireless communication devices. 1-3 Parametric amplification, 4,5 limit cycle oscillations, 6 and injection locking 7 demonstrated for MEMS oscillators allows one to build active circuits where signal processing would be implemented in the mechanical domain. However, a transduction mechanism for the effective conversion between the electrical and mechanical forms of the signal remains one of the key problems in MEMS design.…”

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confidence: 99%

Shell-type micromechanical actuator and resonator

Zalalutdinov

Aubin

Reichenbach

et al. 2003

Applied Physics Letters

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Dome-shaped radio-frequency micromechanical resonators were fabricated by utilizing the buckling of a prestressed thin polysilicon film. The enhanced rigidity of the dome structure leads to a significant increase of its resonant frequency compared to a flat plate resonator. The shell-type geometry of the structure also provides an imbedded actuation mechanism. Significant out-of plane deflections are actuated by mechanical stress introduced within the plane of the shell. We demonstrate that thermomechanical stress generated by a focused laser beam, or microfabricated resistive heater, provides an effective and fast mechanism to operate the dome as an acoustic resonator in the radio-frequency range. All-optical operation of the shell resonator and an integrated approach are discussed. © 2003 American Institute of Physics. ͓DOI: 10.1063/1.1622792͔ High-frequency microelectromechanical systems ͑MEMS͒ are widely considered as an element base for signal processing in the next generation of wireless communication devices. 1-3 Parametric amplification, 4,5 limit cycle oscillations, 6 and injection locking 7 demonstrated for MEMS oscillators allows one to build active circuits where signal processing would be implemented in the mechanical domain. However, a transduction mechanism for the effective conversion between the electrical and mechanical forms of the signal remains one of the key problems in MEMS design. The widely used capacitive drive 8 imposes restrictions related to cross talk issues and to high voltages required for actuation. Piezoelectric 9 or magnetomotive 10 actuation cannot be readily integrated because of the requirement for integrated circuit ͑IC͒-incompatible materials or high magnetic fields.In this letter, we demonstrate a design for a rf MEMS resonator based on the geometry of a shallow segment of a thin spherical shell. The finite curvature of the shell introduces an imbedded actuation mechanism by coupling the in-plane stress to the out-of-plane deflection of the shell. 11 The key feature of the shell actuation mechanism described in this letter is the local nature of the driving stress introduced at a specific point of the shell. A similar approach is employed in the design of macroscopic induced-strain actuators, 12,13 for ''smart structures'' actuated by small piezoelectric patches, surface bonded on a cylindrical shell at certain locations.In our micromechanical shell actuator, the in-plane strain is provided by stress introduced directly inside the shell layer. In our experiments we employ thermoelastic stress created by heating of the shell either by using a focused laser beam or a microfabricated heater. Using local heating, one can actuate cantilevering shell or bowl-type structures ͑shells supported at the center point͒. In the latter case, the compressive stress applied in the hoop direction close to the free edge of the shell flattens the bowl and provides a vertical component to the deflection of the periphery. The resulting motion can be complicated; thus for the configuration cons...

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“…Such designs require an external highly stable frequency source. Resonant MEMS have also been fabricated within active-electrical [15], active-optical [16], or natural-optical [17]- [23] feedback loops to demonstrate self-oscillation. In such systems, DC electricity or unmodulated light is converted into harmonic power, making them particularly useful for MEMS clocks [24] or filters [25], if frequency instability is sufficiently low.…”

mentioning

confidence: 99%

“…In such systems, DC electricity or unmodulated light is converted into harmonic power, making them particularly useful for MEMS clocks [24] or filters [25], if frequency instability is sufficiently low. For MEMS resonators, 1 illuminated within an optical interference field, coupling between displacement and either photothermal stress [17]- [20], [22], [23], [26]- [29], electric charge [21], or light pressure [30]- [36] may lead to a natural closed feedback loop. The sign of the feedback gain is determined by the length of the interference cavity or wavelength of the light used for illumination.…”

mentioning

confidence: 99%

Entrainment of Micromechanical Limit Cycle Oscillators in the Presence of Frequency Instability

Blocher

Zehnder

Rand

2013

J. Microelectromech. Syst.

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Abstract-The nonlinear dynamics of micromechanical oscillators are explored experimentally. Devices consist of singly and doubly supported Si beams, 200 nm thick and 35 μm long. When illuminated within a laser interference field, devices selfoscillate in their first bending mode due to feedback between laser heating and device displacement. Compressive prestress buckles doubly supported beams leading to a strong amplitude-frequency relationship. Significant frequency instability is seen in doubly supported devices. Self-resonant beams are also driven inertially with varying drive amplitude and frequency. Regions of primary, sub-, and superharmonic entrainment are measured. Statistics of primary entrainment are measured for low drive amplitudes, where the effects of frequency instability are measurable. Suband superharmonic entrainment are not seen in singly supported beams. A simple model is built to explain why high-order entrainment is seen only in doubly supported beams. Its analysis suggests that the strong amplitude-frequency relationship in doubly supported beams enables hysteresis, wide regions of primary entrainment, and high orders of sub-and superharmonic entrainment.[2012-0225]

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Autoparametric optical drive for micromechanical oscillators

Abstract: Modeling and analysis of high-speed electro-optic modulation in high confinement silicon waveguides using metal-oxide-semiconductor configuration

Cited by 95 publications

References 14 publications

Addressing geometric nonlinearities with cantilever microelectromechanical systems: Beyond the Duffing model

Addressing geometric nonlinearities with cantilever microelectromechanical systems: Beyond the Duffing model

Shell-type micromechanical actuator and resonator

Entrainment of Micromechanical Limit Cycle Oscillators in the Presence of Frequency Instability

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