“…The most comprehensive work was done by Mindlin[14] which contained five additional material parameters and encompassed other non-local theories as special cases Non-local elasticity has been used to study buckling, bending vibration dislocation mechanics, fracture mechanics, surface tension fluids, etc. (Reddy, 2007;Mohammadi et al, 2012;2013;Moosavi et al, 2011;Danesh et al, 2012;Farajpour et al, 2012) Lam et al (2003, introduced a modified strain gradient theory with three material length scale parameters relevant to dilatation gradient, deviatoric gradient, and symmetric rotation gradient tensors. While some simple size dependent models based on modified couple stress theory have been applied to analyze the pull-in instability of MEMS/NEMS (Tadi HRokni, et al, 2013;Noghrehabadi et al, 2013;Zhang and Fu, 2012;Mindlin and Tiersten, 1962;Yin et al, 2011), only rare works have utilized strain gradient theory for analyzing.…”