Surface functionalization of semiconductors has been the backbone of the newest developments in microelectronics, energy conversion, sensing device design, and many other fields of science and technology. Over a decade ago, the notion of viewing the surface itself as a chemical reagent in surface reactions was introduced, and adding a variety of new functionalities to the semiconductor surface has become a target of research for many groups. The electronic effects on the substrate have been considered as an important consequence of chemical modification. In this work, we shift the focus to the electronic properties of the functional groups attached to the surface and their role on subsequent reactivity. We investigate surface functionalization of clean Sið100Þ-2 × 1 and Geð100Þ-2 × 1 surfaces with amines as a way to modify their reactivity and to fine tune this reactivity by considering the basicity of the attached functionality. The reactivity of silicon and germanium surfaces modified with ethylamine (CH 3 CH 2 NH 2 ) and aniline (C 6 H 5 NH 2 ) is predicted using density functional theory calculations of proton attachment to the nitrogen of the adsorbed amine to differ with respect to a nucleophilic attack of the surface species. These predictions are then tested using a model metalorganic reagent, tetrakis(dimethylamido)titanium (ððCH 3 Þ 2 NÞ 4 Ti, TDMAT), which undergoes a transamination reaction with sufficiently nucleophilic amines, and the reactivity tests confirm trends consistent with predicted basicities. The identity of the underlying semiconductor surface has a profound effect on the outcome of this reaction, and results comparing silicon and germanium are discussed.adsorption | organic | nucleophile | spectroscopy T he recent boom in the development of microelectronics, energy conversion, and sensing devices is tied very closely to our ability to selectively modify well-defined surfaces by chemical means. The opportunities offered by the passivation and functionalization of semiconductor surfaces have already led to the concepts of ultrathin films and molecular-size features in devices being used for practical applications (1). Further development of the field will require that our understanding of the chemical processes on semiconductor surfaces reach a truly molecular level. Surface functionalization can affect either the electronic properties or the chemical reactivity of the semiconductor (2-4). For example, similarly to high-spatial-resolution doping, functionalizing selected areas of a semiconductor surface with predesigned molecules affects the electronic state of the semiconductor (5). Surface chemistry may bring new states into the midgap region of the material as well as affect the positions of HOMO (highest occupied molecular orbital) and LUMO (lowest unoccupied molecular orbital) (6), a degree of control that is especially important in surface functionalization of semiconductor nanostructures, where electronic properties can be affected tremendously by the functional group present on t...