1983
DOI: 10.1016/0167-2584(83)90771-5
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Backscattering correction for quantitative Auger analysis

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Cited by 13 publications
(12 citation statements)
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“…The composition dependent backscattering factor ratios r(x)/ rx calculated by the approximation method for CuPd alloys following (8) are in good agreement with results obtained by different experimental methods and with the values of the Monte Carlo approach given by Ishimura et u1. [30][31][32] From our experiments the linear dependence of the backscattering factor on atomic fraction is confirmed. The same results were found for the inelastic mean free path A.…”
Section: Resultssupporting
confidence: 79%
“…The composition dependent backscattering factor ratios r(x)/ rx calculated by the approximation method for CuPd alloys following (8) are in good agreement with results obtained by different experimental methods and with the values of the Monte Carlo approach given by Ishimura et u1. [30][31][32] From our experiments the linear dependence of the backscattering factor on atomic fraction is confirmed. The same results were found for the inelastic mean free path A.…”
Section: Resultssupporting
confidence: 79%
“…If one assumes that all of the backscattered electrons are emitted from undamaged oxide, the ratio of the damaged and undamaged signals is approximately 1 : R, where R for SiO 2 is estimated to be 0.5. 19,20 In this scenario, a complete reduction of the oxide to elemental Si would be measured as a 66% loss in oxygen rather than 100%. The point-mode exposures reported in Figs 4 and 5 indicate oxygen losses as large as 50% in just a matter of minutes.…”
Section: Discussionmentioning
confidence: 99%
“…These expressions are reproduced here as equations (10): The comparison with the functional expressions (also derived from M.C. simulations) proposed by Pouchou et aL is also shown [11]; these last expressions are: (10) [5] and (11) [11] respect. The curves correspond to solutions of the transport equation using Hartree Fock cross-section (full line) and Lotz cross-section (broken line) [4].…”
Section: Introductionmentioning
confidence: 98%
“…Nevertheless, despite efforts devoted to the évaluation of this matrix effect in various specific situations ( [1][2][3][4][5][6] and références therein) there are only a few algebraic expressions able to give, in general, a numerical values of r. In fact the unique exception we know at oblique incidence are the expressions proposed by Shimizu and derived from Monte Carlo simulations [6] but these expressions only apply at selected angles of incidence a : a = 0° ; 300 ; 450 and the results are expressed as a function of the subtrate atomic number, Z, not directly accessible to the Auger measurements.…”
Section: Introductionmentioning
confidence: 99%