2020
DOI: 10.1021/acsaelm.0c00763
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Balanced Performance Improvement of a-InGaZnO Thin-Film Transistors Using ALD-Derived Al2O3-Passivated High-k HfGdOx Dielectrics

Abstract: High-speed operation and low-power-consumption requirements have accelerated the development of thin-film transistors (TFTs) with exploration of gate dielectrics. In this work, the integration of all-sputtering-derived HfGdO high-k gate dielectrics with amorphous InGaZnO (a-InGaZnO) films has been reported, yielding significant improvements in the performance of a-InGaZnO TFTs. By adjusting the multilayer dielectric sequence, TFT device performance can be precisely manipulated. It has been detected that a-InGa… Show more

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Cited by 25 publications
(9 citation statements)
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“…The smaller value of the SS indicates the more efficient and rapid switching of the TFT from the off state to the on state. Generally, the value of SS depends on the insulating oxide [52][53][54], the semiconductor surface states [55][56][57] and passivation of the surface [58][59][60]. This index is usually extracted from the reciprocal of the slope of Vgs versus log(Ids) plot by the equation:…”
Section: Resultsmentioning
confidence: 99%
“…The smaller value of the SS indicates the more efficient and rapid switching of the TFT from the off state to the on state. Generally, the value of SS depends on the insulating oxide [52][53][54], the semiconductor surface states [55][56][57] and passivation of the surface [58][59][60]. This index is usually extracted from the reciprocal of the slope of Vgs versus log(Ids) plot by the equation:…”
Section: Resultsmentioning
confidence: 99%
“…are widely used as dielectrics for low-power FETs. [216][217][218] However, cracks usually occur when the metal oxide dielectrics are under mechanical bending, which limits their application for flexible FETs.…”
Section: Polymer Composite Based Gate Dielectricsmentioning
confidence: 99%
“…are widely used as dielectrics for low‐power FETs. [ 216–218 ] However, cracks usually occur when the metal oxide dielectrics are under mechanical bending, which limits their application for flexible FETs. On the other hand, the polymer dielectrics have the property of excellent flexibility for flexible FETs, but the dielectric constants of the polymer dielectric layers are usually low, obstructing their applications for low‐power FETs.…”
Section: Functional Polymer Composite Based Electronicsmentioning
confidence: 99%
“…The typical voltage-transfer characteristics (VTCs) of the inverter are shown in Figure 6j, where the output high voltage (V OH ) is close to the supply voltages (V DD ), while the output low voltage (V OL ) is close to 0 V. This benefits from the low off-state current of TFT and good negative bias stability, allowing that the inverter can effectively convert the input voltage signal and display good full swing characteristics. [60,61] Moreover, a sufficiently low subthreshold swing can ensure a good gain for the inverter. [49] Figure 6k shows the voltage gain values (-∂V OUT /∂V IN ) under different V DD .…”
Section: Reliability Evolution and Application Of DC Hj Tftsmentioning
confidence: 99%