“…In addition, the composition and microstructure of the heterointerface can be controlled at the atomic level, which is of great importance to obtain a fundamental understanding about the contribution of heterointerfaces to electrocatalytic activities. There have been great progresses recently in developing ALD processes for various transition metal oxides [32,33,34,35,36,37,38,39,40,41,42] and sulfides [30,31,43,44,45,46,47,48,49,50]. Xiong et al [46] designed and constructed a hybrid compound Fe x Co 1Àx S y electrocatalyst with controllable composition on a complex 3D structure (carbon nanotubes on carbon cloths) for HER by ALD.…”