X-ray Absorption Near Edge Structure (XANES) and Rutherford Backscattering Spectroscopy (RBS) were used to explore the structural phase and composition transitions of ultrathin films with Ti (1-x) Zn 2x O 2 stoichiometries, from very 10 low (~0.5 at.%) to high (~25at.%) titanium content. In this way, the coordination chemistry of Ti 4+ and Zn 2+ cations was examined for a wide range of oxide compositions.Transition metal doping and formation of mixed oxides are 15 widely used mechanisms to improve the intrinsic properties of binary oxides. Both procedures have been decisive to explain the spectacular increase of applications based on ZnO and TiO 2 films. Proven applications of metal-doped ZnO in optoelectronic 20 devices include photovoltaic and dye sensitized solar cells, flat panel displays, photodetectors, gas sensors, light emitting diodes and blue laser diodes [1][2][3][4] . The vast majority of previous work on doped ZnO films is related to doping with group III elements. In particular Al, Ga and In trivalent cations have been extensively 25 used to enhance the n-type conductivity of ZnO films [5][6][7][8][9][10][11] . Fewer studies have been performed on quadrivalent dopants as titanium, which have one more valence than the trivalent cations and can provide two free electrons per atom to improve the conductivity of the ZnO host. In particular the Ti 4+ cation has a slightly smaller 30 radius (6.8 nm) than Zn 2+ (7.4 nm) and, thus, it can act as a suitable donor in ZnO films. Some authors have reported an enhancement of the conductivity in Ti-ZnO (TZO) films for low titanium content (<1.5 at%) [12][13][14][15][16] . However, the conduction mechanism of the metal-semiconductor transition in ZnO is still unclear [17][18] . In turn, ZnO-TiO 2 mixed oxides have been widely studied to be used as gas sensors [19][20] inverse spinel crystal structure with a unit cell a = 0.846 nm), zinc meta-titanate ZnTiO 3 (either cubic inverse defect spinel, a = 0.840 nm or hexagonal ilmenite structure, a = 0.507 nm) and Zn 2 Ti 3 O 8 (cubic inverse defect spinel, a = 0.843 nm) are still under debate 27-29 . 50 Despite the extensive studies performed on the individual TZO and ZnO-TiO2 systems in areas such as photovoltaics, photocatalysis or optoelectronics, there is a lack of a systematic work to fully understand how the Ti incorporation takes place in the ZnO oxide structure either as dopant or to form mixed oxides.
55In particular, one of the current technological challenges is the elucidation of such mechanism for nanostructured and ultrathin films due to the size-dependent electronic and optical properties of these semiconductor materials, as discussed in ref. O (α, α) 16 O at that particular energy and, therefore, to improve the sensitivity to oxygen. The chemical composition values have been extracted using the RBX software 34 . The X-ray Absorption Near Edge Structure (XANES) measurements were done at the PM4 beamline of the Bessy II 95 synchrotron facility (Berlin, Germany), using the SurICat endstation. Th...