Bandpass filters for 8 GHz using solidly mounted bulk acoustic wave resonators

Lanz, R.; Muralt, Paul

doi:10.1109/tuffc.2005.1504016

Cited by 30 publications

(26 citation statements)

References 34 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…However, the complex structures of the SPR and the high manufacturing cost of the QCM impose limits on the miniaturization and batch fabrication [4]. In recent years, the substantial progress in thin-film electroacoustic technology, such as film bulk acoustic resonators (FBARs), penetrates communication circuit applications [7]- [9] and biological/chemical sensing applications [10], [11]. The driving force of this development has been to replace the use of an expensive single crystalline substrate in the megahertz region with various piezoelectric thin films which would provide significantly higher frequencies (approximately in gigahertz) and integration capability with an integrated circuit to reduce manufacturing cost.…”

Section: Introductionmentioning

confidence: 99%

A High-Quality-Factor Film Bulk Acoustic Resonator in Liquid for Biosensing Applications

Zhang

Choi

et al. 2011

J. Microelectromech. Syst.

View full text Add to dashboard Cite

We report a high-quality-factor (Q) film bulk acoustic resonator (FBAR) operating in liquid environments. By integrating a microfluidic channel to a longitudinal-mode FBAR, a Q of up to 150 is achieved with direct liquid contacting. A transmission line model is used to theoretically predict the Q behavior of the FBAR. The model suggests an oscillatory pattern of Q as a function of the channel thickness and the acoustic wavelength in the liquid, which is experimentally verified by precisely controlling the channel thickness. This FBAR biosensor is characterized in liquids for the real-time in situ monitoring of the competitive adsorption/exchange of proteins, the Vroman effect. The FBAR offers a minimum detectable mass of 1.35 ng/cm 2 and is successfully implemented in a Pierce oscillator as a portable sensing module.[2010-0220]

show abstract

Section: Introductionmentioning

confidence: 99%

A High-Quality-Factor Film Bulk Acoustic Resonator in Liquid for Biosensing Applications

Zhang

Choi

et al. 2011

J. Microelectromech. Syst.

View full text Add to dashboard Cite

show abstract

“…(13) The Mason and Butterworth-Van Dyke (BVD) model equivalent circuits are used for determining the material parameters and resonance performance of a piezoelectric device. (14) By controlling each parameter, the effects of piezoelectric film thickness, material properties, or even the electrode active area on SMR performance can be investigated.…”

Section: Introductionmentioning

confidence: 99%

Simulation of Solidly Mounted Resonator Using Mason Model and Its Implementation

2017

Sensors and Materials

View full text Add to dashboard Cite

Acoustic wave devices are divided into two categories: surface acoustic wave (SAW) and bulk acoustic wave (BAW) devices. To provide modification parameters during manufacturing, advanced modeling, simulation, and other computational methods is crucial for maintaining a competitive edge through efficient product design. In this study, an equivalent circuit modification based on the Mason model is used for obtaining the actual device measurements. The effects of various film conditions, material properties, and geometrical variations on resonator performance are investigated. Furthermore, the performance of a filter comprising various stages of series and parallel resonators is examined.

show abstract

“…The advantages of the well known silicon micromachining technologies can be used and very thin GaN and AlN membranes can be manufactured. FBAR structures realized on an AlN/diamond layer, working at 8 GHz have been reported [1], a few years ago. In the case of GaN, the monolithic integration (with different passive and active circuit elements including high electron mobility transistors -HEMTs) is an exciting prospect.…”

Section: Introductionmentioning

confidence: 99%

Morphological analysis of GaN membranes obtained by micromachining of GaN/Si

Cismaru

Müller

Comănescu

et al. 2013

2013 IEEE International Reliability Physics Symposium (IRPS)

View full text Add to dashboard Cite

The morphological analysis is targeted towards a better understanding of the reliability of GaN membranes obtained by micromachining of GaN/Si. These membranes are used as support for devices like FBARs or backside-illuminated UV photodetectors. The deflection analysis is performed on 0.4 µm GaN thin membranes. As result of our investigations, focused on deflection and stress distribution in the membrane, further reducing of membrane thickness, to improve devices' electrical performances, is possible without affecting their reliability.

show abstract

Bandpass filters for 8 GHz using solidly mounted bulk acoustic wave resonators

Cited by 30 publications

References 34 publications

A High-Quality-Factor Film Bulk Acoustic Resonator in Liquid for Biosensing Applications

A High-Quality-Factor Film Bulk Acoustic Resonator in Liquid for Biosensing Applications

Simulation of Solidly Mounted Resonator Using Mason Model and Its Implementation

Morphological analysis of GaN membranes obtained by micromachining of GaN/Si

Contact Info

Product

Resources

About