Abstract:The plasma modification of polydimethylsiloxane (PDMS) substrates is one way to change their surface geometry, which enables the formation of wrinkles. However, these changes are very often accompanied by the process of restoring the hydrophobic properties of the modified material. In this work, the RF PACVD device (radio frequency plasma-assisted chemical vapor deposition) was used, with which the plasma treatment of PDMS substrates was carried out in argon, nitrogen, oxygen, and methane atmospheres at variab… Show more
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