In this paper, we present the effect of postimplantation high-temperature annealing at 1600 C on electrical properties and lattice structures of B-implanted diamonds. B multiple ion implantation at 30 -360 keV was performed to make a B boxprofile of 5 Â 10 18 or 5 Â 10 19 cm À3 into high-pressure, high-temperature type IIa diamond substrates at 400 C, followed by 1450 C and higher temperature annealing at 1600 C. Optical transmission spectra indicated that radiation damage was almost eliminated with an increase in annealing temperatures to 1600 C in both samples. In the sample of 5 Â 10 18 cm À3 , the hole concentration and the Hall mobility were 2 Â 10 13 cm À3 and 55 cm 2 V À1 s À1 after 1450 C annealing, respectively. By contrast, after 1600 C annealing, their values increased to 6:5 Â 10 13 cm À3 and 82 cm 2 V À1 s À1 , respectively. The doping efficiency of the sample after 1600 C annealing is $50%, which is the highest ever reported for B-implanted diamond. In the sample of 5 Â 10 19 cm À3 , the band conduction of carriers was observed after 1450 C annealing, while high-temperature annealing at 1600 C resulted in the appearance of hopping conduction in the low-temperature region below 400 K. In cathodoluminescence spectra of the samples annealed at 1600 C, the peak intensities around 780 nm, originating from radiation defects frequently observed in ion implanted diamond, decreased, while a broad band centering around 560 nm appeared. The results of this study suggest that high-temperature annealing over 1450 C is effective for elimination of radiation damage and an increase in the acceptor concentration.