Batch-fabricated milli-actuators

Fan, Long-Sheng; Lane, L.H.; Robertson, N.; Crawforth, L.; Moser, M.; Reiley, T.C.; Imaino, W.

doi:10.1109/memsys.1993.296926

Cited by 17 publications

(6 citation statements)

References 14 publications

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“…Applying a small control voltage over a large bias voltage has been known to improve the linearity in the limited range of 1-D electrostatic actuators whose output is governed by the square of voltage [16]. It has been also known that differential drive with bias voltage can further improve the linearity of 1-D comb drive actuator of lateral motion [17] and 1-D torsion mirror [18].…”

Section: Linearization By Differential Voltage Operationmentioning

confidence: 99%

“…It has been also known that differential drive with bias voltage can further improve the linearity of 1-D comb drive actuator of lateral motion [17] and 1-D torsion mirror [18]. However, behavior of 2-D-torsion mirror has not been fully understood because of the complexity in describing electrostatic force as a function of rotational angles and vertical translation of the mirror.…”

Section: Linearization By Differential Voltage Operationmentioning

confidence: 99%

See 1 more Smart Citation

Linearization of electrostatically actuated surface micromachined 2-D optical scanner

Toshiyoshi

Piyawattanametha

Chan

et al. 2001

J. Microelectromech. Syst.

118

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This paper presents an effective method of linearizing the electrostatic transfer characteristics of micromachined two-dimensional (2-D) scanners. The orthogonal scan angles of surface micromachined polysilicon scanner are controlled by using quadrant electrodes for electrostatic actuation. By using a pair of differential voltages over a bias voltage, we could improve the distortion of projected images from 72% to only 13%. A theoretical model has been developed to predict the angle-voltage transfer characteristics of the 2-D scanner. The simulation results agree very well with experimental data. Differential voltage operation has been found to suppress the crosstalk of two orthogonal scan axes by both experimentally and theoretically. We have found that a circular mirror is expected to have the lowest angular distortion compared with square mirrors. Perfect grid scanning pattern of small distortion (0.33%) has been successfully obtained by predistorting the driving voltages after calibration.[604]Index Terms-Electrostatic analysis, electrostatic force, microactuators, optical 2-D scanner, torsion mirror.

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Section: Linearization By Differential Voltage Operationmentioning

confidence: 99%

Section: Linearization By Differential Voltage Operationmentioning

confidence: 99%

Linearization of electrostatically actuated surface micromachined 2-D optical scanner

Toshiyoshi

Piyawattanametha

Chan

et al. 2001

J. Microelectromech. Syst.

118

View full text Add to dashboard Cite

show abstract

“…To satisfy these requirements, a new microactuator design was devised, called a bipolar microactuator. The linearity issue was discussed in earlier work [4], but this is the first microactuator that addresses slider grounding issue. The design and structure are shown in Fig.…”

Section: A Bipolar Microactuator Design and Driving Methodsmentioning

confidence: 99%

A Moving-Slider MEMS Actuator for High-Bandwidth HDD Tracking

et al. 2004

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A moving-slider microactuator for high track pitch HDDs was investigated. A new microactuator design called a bipolar microactuator that enables both high stroke and good linearity was proposed. For easier assembly, a new microactuator fabrication technique was developed that enables the bonding pads on the sidewall of the microactuator chip. The microactuator was assembled into a server-class HDD, and a servo bandwidth of 8 kHz was demonstrated with an 80-kHz sampling rate.Index Terms-Bipolar actuator, high-bandwidth tracking servo, MEMS, microactuator, sidewall bonding pad.

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“…Large companies, such as IBM, AT&T, Ford, Texas Instruments Honeywell, Motorola, Nova-Sensor, Hewlett-Packard and Analog Devices, founded their own MST research groups and have already developed their first products [Mast93], [Stix92], [Fan93], [Furu93]. The largest contributions are given by small and medium-sized companies which have recently gone from microelectronics to MST and which are developing various components for microsensors and -actuators.…”

Section: Mst Activities In Japanmentioning

confidence: 99%