Bent-beam electrothermal actuators-Part II: Linear and rotary microengines

Park, Jaesung; Chu, L.L.; Oliver, Andrew; Gianchandani, Yogesh B.

doi:10.1109/84.925774

Cited by 141 publications

(41 citation statements)

References 18 publications

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“…Thermal actuation has been demonstrated as a compact, stable and high-force actuation technique [7] with some advantages over electrostatic actuation. Thermal actuators have been employed in a variety of applications: linear and rotary microengines [17], 2D nanoscale positioners [4], optical benches [16] and instrumentation for material property characterization [10]. Thermal actuators have also been integrated with compliant mechanisms to increase their displacement range for certain applications [4].…”

Section: Introductionmentioning

confidence: 99%

A thermal actuator for nanoscalein situmicroscopy testing: design and characterization

Zhu

Corigliano²,

Espinosa

2006

J. Micromech. Microeng.

213

155

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This paper addresses the design and optimization of thermal actuators employed in a novel MEMS-based material testing system. The testing system is designed to measure the mechanical properties of a variety of materials/structures from thin films to one-dimensional structures, e.g. carbon nanotubes (CNTs) and nanowires (NWs). It includes a thermal actuator and a capacitive load sensor with a specimen in-between. The thermal actuator consists of a number of V-shaped beams anchored at both ends. It is capable of generating tens of milli-Newton force and a few micrometers displacement depending on the beams' angle and their number. Analytical expressions of the actuator thermomechanical response are derived and discussed. From these expressions, a number of design criteria are drawn and used to optimize the device response. The analytical predictions are compared with both finite element multiphysics analysis (FEA) and experiments. To demonstrate the actuator performance, polysilicon freestanding specimens cofabricated with the testing system are tested.

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Section: Introductionmentioning

confidence: 99%

A thermal actuator for nanoscalein situmicroscopy testing: design and characterization

Zhu

Corigliano²,

Espinosa

2006

J. Micromech. Microeng.

213

155

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“…The translating link is the shuttle of a V-beam electrothermal actuator 8,33 , consisting of five compliant beams with common electrical connections at the fixed ends, and a nominally rigid bisecting beam. An input voltage v causes an electrical current to flow through the compliant beams, which reversibly heat and expand.…”

Section: Methodsmentioning

confidence: 99%

Transfer of motion through a microelectromechanical linkage at nanometer and microradian scales

et al. 2016

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Mechanical linkages are fundamentally important for the transfer of motion through assemblies of parts to perform work. Whereas their behavior in macroscale systems is well understood, there are open questions regarding the performance and reliability of linkages with moving parts in contact within microscale systems. Measurement challenges impede experimental studies to answer such questions. In this study, we develop a novel combination of optical microscopy methods that enable the first quantitative measurements at nanometer and microradian scales of the transfer of motion through a microelectromechanical linkage. We track surface features and fluorescent nanoparticles as optical indicators of the motion of the underlying parts of the microsystem. Empirical models allow precise characterization of the electrothermal actuation of the linkage. The transfer of motion between translating and rotating links can be nearly ideal, depending on the operating conditions. The coupling and decoupling of the links agree with an ideal kinematic model to within approximately 5%, and the rotational output is perfectly repeatable to within approximately 20 microradians. However, stiction can result in nonideal kinematics, and input noise on the scale of a few millivolts produces an asymmetric interaction of electrical noise and mechanical play that results in the nondeterministic transfer of motion. Our study establishes a new approach towards testing the performance and reliability of the transfer of motion through assemblies of microscale parts, opening the door to future studies of complex microsystems.

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“…The drawback of a cascaded structure is an increased risk of out-of-plane buckling, which has to be prevented by limiting the operational temperature. Early examples of applications of the cascaded chevron actuators include rotary and rectilinear micro-engines [89]. In the rotary engine, the two orthogonal drives consist of cascaded V-chevrons.…”

Section: Cascaded Chevron Actuatorsmentioning

confidence: 99%

Review of Electrothermal Actuators and Applications

2019

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This paper presents a review of electrothermal micro-actuators and applications. Electrothermal micro-actuators have been a significant research interest over the last two decades, and many different designs and applications have been investigated. The electrothermal actuation method offers several advantages when compared with the other types of actuation approaches based on electrostatic and piezoelectric principles. The electrothermal method offers flexibility in the choice of materials, low-cost fabrication, and large displacement capabilities. The three main configurations of electrothermal actuators are discussed: hot-and-cold-arm, chevron, and bimorph types as well as a few other unconventional actuation approaches. Within each type, trends are outlined from the basic concept and design modifications to applications which have been investigated in order to enhance the performance or to overcome the limitations of the previous designs. It provides a grasp of the actuation methodology, design, and fabrication, and the related performance and applications in cell manipulation, micro assembly, and mechanical testing of nanomaterials, Radio Frequency (RF) switches, and optical Micro-Electro-Mechanical Systems (MEMS).

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Bent-beam electrothermal actuators-Part II: Linear and rotary microengines

Cited by 141 publications

References 18 publications

A thermal actuator for nanoscalein situmicroscopy testing: design and characterization

A thermal actuator for nanoscalein situmicroscopy testing: design and characterization

Transfer of motion through a microelectromechanical linkage at nanometer and microradian scales

Review of Electrothermal Actuators and Applications

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