Benzocyclobutene interlayer dielectrics for thin film multichip modules

Johnson, Richard W.; Phillips, T.L.; Weidner, W. Ken; Hahn, Stephen F.; Burdeaux, D. C.; Townsend, P. H.

doi:10.1109/33.56168

Cited by 28 publications

(15 citation statements)

References 6 publications

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“…One wafer was left uncured and two other wafers were cured at two different temperatures below and above 200°C, which is the activation temperature of BCB polymerization [31,32]. The exact cure temperatures are listed in Table 6.…”

Section: Characterization Of Cmp For Bcb Polymersmentioning

confidence: 99%

Embedded benzocyclobutene in silicon: An integrated fabrication process for electrical and thermal isolation in MEMS

Modafe

Ghalichechian

Powers

et al. 2005

Microelectronic Engineering

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Section: Characterization Of Cmp For Bcb Polymersmentioning

confidence: 99%

Embedded benzocyclobutene in silicon: An integrated fabrication process for electrical and thermal isolation in MEMS

Modafe

Ghalichechian

Powers

et al. 2005

Microelectronic Engineering

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“…For the FPA presented in this paper photo-sensitive BCB was used. The advantage of BCB compared to similar materials, such as polyimide, is a lower dielectric loss, a lower mechanical stress and a lower processing temperature [6]. The FPA is fabricated by Acreo AB, Norrköping, Sweden [7], in a modified MCM-D process that comprises three layers of 15 m thick BCB and four Cu metal layers.…”

Section: Manufacturing Technologymentioning

confidence: 99%

A new staring 94-GHz focal plane array

Svedin

Huss

2004

SPIE Proceedings

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A new staring 94 GHz focal plane array (4x8 pixels) multi-chip module (MCM) using a quasi-optically pumped MMIC gate mixer is presented. The new MCM with integrated microstrip antennas, matching and bias networks are manufactured using a modified MCM-D process based on 3x15 m BCB. The active gate mixer MMIC was manufactured by OMMIC (D01PH process) and uses a 2x25 um gate width. The 30 cm dielectric lens antenna has a F/D number of approximately unity. To minimize the spillover loss, the beamwidth of the feed antennas (microstrip antennas) was matched to the opening angle of the lens by using 2x2 subarrays for each pixel. Preliminary measurement results show a feed antenna gain of approximately 10 dBi and a conversion loss close to zero at 94 GHz, and an optimal pumping power of -2 dBm at 92.4 GHz.

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“…Relevant references on the behavior of BCB monomers 99 and 100, introduced by Dow Chemical, were published in specialized technical papers. [161][162][163] When properly cured at 250°C under nitrogen to avoid oxidation, BCB polymers have a Tg of 350°C, a dielectric constant below 2.8, dielectric losses below 0.001 and a water absorption of 0.2-0.3 wt% after 24 h in boiling water. However, high sensitivity to air oxidation and poor adhesive properties are serious drawbacks which deserve further investigation.…”

Section: Benzocyclobutene-terminated Polymersmentioning

confidence: 99%

Heterocyclic polymers with high glass transition temperatures

Sillion¹,

Rabilloud²

1995

New Methods of Polymer Synthesis

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Glass transition temperatures (Tgs) of polymers have been correlated with the concept of free volume so that the relationship between Tg and the molecular mass M (7.1) where T; is the glass transItIon temperature for infinite molecular weight, K is a constant and M is the molecular weight. This relation is understandable if one considers that the fractional free volume due to the chain ends decreases as the molecular weight increases. Assuming that molecular motion of a chain end is greater than for an internal part of the chain, a low molecular weight polymer will have a Tg lower than a corresponding high molecular weight polymer. The constant K is the contribution of the end-groups (7.2) where p is the polymer density, N A is Avogadro's number, e is the contribution of a chain end to the free volume and a[ is the thermal expansion coefficient of the free volume.A few long branches on a polymer backbone decrease Tg by increasing the number of chain ends, while regular short branching along the chain increases both the stiffness and Tg and decreases chain mobility. Crosslinking reduces the specific volume so that Tg rises as a consequence of the reduction in molecular motion. l For homo cyclic and heterocyclic aromatic polymers, structure-property relationships have been reviewed mainly for polyimides and some general features have been pointed out. In the case of aromatic substitution, meta-versus para-catenation decreases Tg and flexible bridging groups such as oxygen or methylene decrease Tg more than do highly dipolar groups such as carbonyl and sulfone. Bulky substituents or substituents which restrict free rotation between two phenyl rings also increase Tg• 2 ,3 Aromatic and heterocyclic high performance polymers are very often amorphous and the variation in properties is governed by Tg• J. R. Ebdon et al. (eds.), New Methods of Polymer Synthesis

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Benzocyclobutene interlayer dielectrics for thin film multichip modules

Cited by 28 publications

References 6 publications

Embedded benzocyclobutene in silicon: An integrated fabrication process for electrical and thermal isolation in MEMS

Embedded benzocyclobutene in silicon: An integrated fabrication process for electrical and thermal isolation in MEMS

A new staring 94-GHz focal plane array

Heterocyclic polymers with high glass transition temperatures

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