Bi-Sr-Ca-Cu-O film on sapphire grown by plasma-enhanced halide CVD

Abstract

We developed plasma-enhanced halide chemical vapor deposition (CVD) for Bi-Sr-Ca-Cu-0 (BSCCO) thin film. Superconducting BSCCO films were fabricated on 3-inch diameter sapphire substrates without postannealing. The CVD apparatus has four source-gas generation cells in which source materials (BiC13, SrI2, CaI2, and CUI) are evaporated or sublimated by heaters. Source gases are carried to the deposition chamber with helium. Oxidizing gases are 0 2 and/or H20. The total pressure in the deposition chamber was 0.1 torr and the 0 2 partial pressure 0.01 torr.We found that the superconducting BSCCO film could be deposited on sapphire substrates at less than 700°C without a solid-phase reaction between the film and substrate, and that plasma-enhanced CVD controlled the BSCCO phases even at 580°C. RF-plasma enhancement resulted in as-deposited superconducting BSCCO films. The caxis orientation of the films was perpendicular to the sapphire's (li02)-plane.The 700-A-thick (2212)-phase BSCCO film showed that the resistive transition started at about 110 K and that the zero-resistivity temperature was 70 K. The critical current density was about 2.5~106 Ncm2 at 10 K.Deposition was at 2 &min.

High critical current density in Ag-doped Bi-2212 thin films

“…Study of the critical current density versus temperature indicated that Bi-2212 could be useful at temperatures as high as 30 K, with current densities above 10 4 A cm −2 at 10 T easily obtained [12]. Nevertheless, an impressive result was reported by Kimura et al [13] for Bi-2212 films prepared by oxygen plasma enhanced chemical vapor deposition (CVD). This report showed that the critical current density determined by transport measurements for Bi-2212 on single-crystal substrates of MgO is 10 6 A cm −2 at 10 K in self-field.…”

Biaxially textured superconductor bi-oxide films via an electrodeposition process

“…The critical current density of the film is calculated from magnetization data collected by Quantum Design SQUID magnetometer. The earlier work of Kimura et al [11] indicates the zero-field transport value of biaxially textured Bi-2212 on single crystal at 4.2 K could be near 10 A/cm . Kimura et al prepared the film by using plasma-enhanced halide chemical vapor deposition technique.…”

A Two-Dimensional Simulation of Pulsed Discharge for a Color DC-Type Plasma Display Panel

“…The critical current density of the film is calculated from magnetization data collected by Quantum Design SQUID magnetometer. The earlier work of Kimura et al [9] indicates that the zero-field transport J c value of biaxially textured Bi-2212 on single crystal at 4.2 K could be near 10 7 A cm −2 . Kimura et al prepared the film by using plasma-enhanced halide chemical vapour deposition technique.…”