Biaxial MEMS raster scanner with linear ramp drive

Ürey, Hakan; Sprague, R.

doi:10.1109/omems.2003.1233516

Cited by 3 publications

(1 citation statement)

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“…There should be an integer ratio between the two axis frequencies in a master-slave configuration to produce a stationary raster pattern. Due to the large number of harmonics present in a saw tooth scan waveform, the slow axis scanner dynamics as well as the changes in the dynamics of both axes due to temperature shifts need to be taken into account when designing the excitation waveform [107].…”

Section: Non-resonant Scanners (Slow Axis)mentioning

confidence: 99%

MEMS Laser Scanners: A Review

Holmström

Baran

Ürey

2014

J. Microelectromech. Syst.

405

175

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Laser scanners have been an integral part of MEMS research for more than three decades. During the last decade, miniaturized projection displays and various medicalimaging applications became the main driver for progress in MEMS laser scanners. Portable and truly miniaturized projectors became possible with the availability of red, green, and blue diode lasers during the past few years. Inherent traits of the laser scanning technology, such as the very large color gamut, scalability to higher resolutions within the same footprint, and capability of producing an always-in-focus image render it a very viable competitor in mobile projection. Here, we review the requirements on MEMS laser scanners for the demanding display applications, performance levels of the best scanners in the published literature, and the advantages and disadvantages of electrostatic, electromagnetic, piezoelectric, and mechanically coupled actuation principles. Resonant high-frequency scanners, low-frequency linear scanners, and 2-D scanners are included in this review. [2013-0235]

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Section: Non-resonant Scanners (Slow Axis)mentioning

confidence: 99%