2005
DOI: 10.1117/12.624166
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Big OptiX ultra precision grinding/measuring system

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Cited by 25 publications
(22 citation statements)
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“…It is not proposed to discuss differences in modern machines and applications in this paper, as it would require too much space for a single paper. However, a schematic of a special-purpose grinding machine is shown in Figure 3 as an example of innovative designs produced to achieve high productivity in the grinding of high precision mirrors and lenses [5]. Whereas most machines are based on an open "C" or "U" shaped structure for convenience of part-loading, a new generation of high precision machines employ a box structure to limit machine deflections.…”
Section: What Is the Potential For Future Innovationmentioning
confidence: 99%
“…It is not proposed to discuss differences in modern machines and applications in this paper, as it would require too much space for a single paper. However, a schematic of a special-purpose grinding machine is shown in Figure 3 as an example of innovative designs produced to achieve high productivity in the grinding of high precision mirrors and lenses [5]. Whereas most machines are based on an open "C" or "U" shaped structure for convenience of part-loading, a new generation of high precision machines employ a box structure to limit machine deflections.…”
Section: What Is the Potential For Future Innovationmentioning
confidence: 99%
“…Increasing the stiffness and optimizing arrangement of air bearings are the most effective way to enhance the machine's dynamic performance. It should be noted that in conventional precision machine design, the first natural frequency is expected to be higher than the machine operation frequency [15], for example, the spindle rotational frequency. However, it cannot be the case in ultraprecision micro milling machine, because the maximum spindle speed in micro milling machine can be up to 4000 Hz (240,000 rpm).…”
Section: Modal Analysismentioning
confidence: 99%
“…In this study, the first ten natural frequency and their vibration mode shapes were extracted for both configurations using the block Lanczos method. Table 1 lists the first ten natural frequencies and the description of the mode for the bench- design, the first natural frequency is expected to be higher than the machine operation frequency [14], for example, the spindle rotational frequency. However, it can not be the case in ultraprecision micro milling machine, because the maximum spindle speed in micro milling machine will be up to 4000 Hz (240,000 rpm).…”
Section: Modal Analysismentioning
confidence: 99%