“…More recently Stan et al investigated the effects of processing parameters from bioactive silicate glass targets, including bioglass® 45S5. He was unable to obtain a stoichiometric 45S5 composition due to preferential sputtering, however he found that the composition of deposited thin films, could be manipulated by varying deposition pressure and atmosphere [25][26][27][28]. Berbecaru et al deposited a 0.5 μm thick bioactive glass coating (SiO 2 -40.5 CaO-32 P 2 O 5 -1.5 Na 2 O-9 MgO-17 mol%) on silicon substrates which were subsequently immersed for 30 days in SBF, and appeared to follow the stages of Hench's bioactivity theory, beginning with the solubility and degradation of the silicon network, followed by the formation of a calcium-phosphate apatite layer at the surface.…”