2019
DOI: 10.1016/j.surfcoat.2019.01.106
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Bioapplication of TiN thin films deposited using high power impulse magnetron sputtering

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Cited by 44 publications
(19 citation statements)
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“…The coated alloys show better corrosion protection behavior in both SBF and the artificial saliva medium. Wu et al (2019) used the high-power impulse magnetron sputtering (HiPIMS) method which has high peak current and maximum power to deposit TiN on TiAl6V4. The 110 A deposited coating exhibits the highest cell viability.…”
Section: Physical Modificationmentioning
confidence: 99%
“…The coated alloys show better corrosion protection behavior in both SBF and the artificial saliva medium. Wu et al (2019) used the high-power impulse magnetron sputtering (HiPIMS) method which has high peak current and maximum power to deposit TiN on TiAl6V4. The 110 A deposited coating exhibits the highest cell viability.…”
Section: Physical Modificationmentioning
confidence: 99%
“…This, combined with the reduced surface roughness arising from the smaller macroparticles present in the film (Figure 3c), allows the production of smoother ta-C films [41]. The ability to grow carbon films with high content of sp 2 hybridized carbon atoms, and particularly in multilayer configurations through simple process control, is also an advantage when higher electrical conductivity is desired such as for (Metal-Insulator-Metal) MIM films [42] or biosensors [43,44] or when the dry lubricant properties of a highly graphitic film are desired.…”
Section: J O U R N a L P R E -P R O O Fmentioning
confidence: 99%
“…Buharlaştırma [126], [127] İyon kaplama [128] Sıçratma (Sputtering) [129]- [132] Yüzeyde ∼1 μm kalınlığında TiN, TiC, TiCN, elmas ve elmas benzeri karbon ince film oluşturularak aşınma direnci, korozyon direnci ve biyouyumluluk iyileştirilir.…”
Section: Fiziksel Buhar Biriktirme (Pvd) Yöntemleriunclassified