Biocompatibility and surface properties of hydrogenated amorphous silicon-germanium thin films prepared by LF-PECVD

López-Huerta, Francisco; García, Ricardo; González, Leandro García; Herrera-May, Agustín L.; Calleja-Arriaga, W.; Vega, Rosario; Soto, Enrique

doi:10.1088/1757-899x/628/1/012003

Cited by 10 publications

(6 citation statements)

References 18 publications

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“…The electrode showed at least 10× reduction in electrochemical impedance, ~7% transmittance improvement, and stability after over 600 cycles of mechanical bending (Yang et al, 2019b ). Other semiconducting materials, such as germanium (Ge), silicon germanium alloy (SiGe), indium-doped zinc oxide (IZO), indium-gallium-zinc oxide (a-IGZO), and zinc oxide (ZnO), has also been investigated as recording electrode materials because of their desired electrical, mechanical, optical, biocompatible, and stable/biodegradable properties (Gao et al, 2012 ; Dagdeviren et al, 2013 ; Lee et al, 2015 ; Gutierrez-Heredia et al, 2017 ; Mao et al, 2018 ; Huerta et al, 2019 ).…”

Section: Electrode Materialsmentioning

confidence: 99%

A Review: Electrode and Packaging Materials for Neurophysiology Recording Implants

Yang

Gong

2021

Front. Bioeng. Biotechnol.

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To date, a wide variety of neural tissue implants have been developed for neurophysiology recording from living tissues. An ideal neural implant should minimize the damage to the tissue and perform reliably and accurately for long periods of time. Therefore, the materials utilized to fabricate the neural recording implants become a critical factor. The materials of these devices could be classified into two broad categories: electrode materials as well as packaging and substrate materials. In this review, inorganic (metals and semiconductors), organic (conducting polymers), and carbon-based (graphene and carbon nanostructures) electrode materials are reviewed individually in terms of various neural recording devices that are reported in recent years. Properties of these materials, including electrical properties, mechanical properties, stability, biodegradability/bioresorbability, biocompatibility, and optical properties, and their critical importance to neural recording quality and device capabilities, are discussed. For the packaging and substrate materials, different material properties are desired for the chronic implantation of devices in the complex environment of the body, such as biocompatibility and moisture and gas hermeticity. This review summarizes common solid and soft packaging materials used in a variety of neural interface electrode designs, as well as their packaging performances. Besides, several biopolymers typically applied over the electrode package to reinforce the mechanical rigidity of devices during insertion, or to reduce the immune response and inflammation at the device-tissue interfaces are highlighted. Finally, a benchmark analysis of the discussed materials and an outlook of the future research trends are concluded.

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Section: Electrode Materialsmentioning

confidence: 99%

A Review: Electrode and Packaging Materials for Neurophysiology Recording Implants

Yang

Gong

2021

Front. Bioeng. Biotechnol.

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“…Previous studies showed that DLC coatings had superior biocompatibility and cell attachment properties in several cell line such as osteoblast, fibroblast, and keratinocytes cell cultures 40–42 . Moreover, geranium based surface modifications were claimed that they have biocompatible properties and these materials did not stimulate toxic features for cell cultures 37,43,44 . In parallel with the literature, DLC–Ge coating supported cell growth and attachment in a favorable manner that cell survival ratio was analyzed to have similar properties to (−) Control with 95% cell viability rate (Figure 3).…”

Section: Resultsmentioning

confidence: 66%

“…[40][41][42] Moreover, geranium based surface modifications were claimed that they have biocompatible properties and these materials did not stimulate toxic features for cell cultures. 37,43,44 In parallel with the literature, DLC-Ge coating supported cell growth and attachment in a favorable manner that cell survival ratio was analyzed to have similar properties to (À) Control with 95% cell viability rate (Figure 3). After 24 h of seeding, fibroblast cell culture spread was found favorable on the GE-DLC coating compared to uncoated borosilicate glass surface ([+] Control) which was investigated by using Hoechst 33258 fluorescent staining (Figure 4).…”

Section: Structural and Morphological Characterizationmentioning

confidence: 85%

Structural, biocompatibility, and antibacterial properties of Ge–DLC nanocomposite for biomedical applications

et al. 2022

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Integrative production of new nanocomposites has been used to enhance favorable features of biomaterials for unlocking ultimate potential of different molecules. In the present study, advantageous properties of diamond like carbons (DLC) and germanium (Ge) like greater biocompatibility and antibacterial attributes were aimed to combined into a thin film. For this purpose, 400 nm DLC–Ge nanocomposite was coated on the borosilicate glasses via the magnetron sputtering and surface characteristics was analyzed by scanning electron microscopy (SEM), energy dispersive spectroscopy (EDS) and The Raman spectrum. Biocompatibility analysis were performed by 3‐(4,5‐Dimethylthiazol‐2‐yl) (MTT) cell viability assay and Hoechst 33258 fluorescent staining genotoxicity assessments on the human fibroblast cell line (HDFa). Finally, antibacterial properties of DLC–Ge nanocomposite coatings were investigated by Pseudomonas aeruginosa (ATCC 27853) and Staphylococcus aureus (ATCC 25923) bacterial attachment analysis. As a result of magnetron sputtering coating, nearly 400 nm thick DLC–Ge nanocomposite film showed a smooth, a non‐porous, and a dense characteristic. Cell viability analysis showed that Ge–DLC coatings permits %95 cell surface growth of fibroblast cells. Also, there were no significant difference in aspect of nuclear abnormalities compared to the (−) control which showed nonmutagenic features of the thin film. Finally, antibacterial attachment analysis put forth that Ge–DLC coatings inhibits bacterial adhesion as %40 and %25 rates for P. aeruginosa and S. aureus bacterial strains, respectively. From these results, DLC–Ge nanocomposites could be proposed as a potential new biomaterial for various biomedical applications.

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“…In recent years, silicon–germanium (SiGe) films such as hydrogenated amorphous SiGe (a-SiGe:H) and hydrogenated microcrystalline SiGe (μc-SiGe:H) have been known as potential materials for thin-film solar cells, microelectromechanical systems (MEMS), and biomedical applications. − In the semiconductor industry field, a surface channel in a metal-oxide-semiconductor field-effect transistor (MOSFET) with a graded SiGe film enhanced electron mobility due to the tensile strain . Thermal chemical vapor deposition (CVD) above 1000 °C is used for high-quality film, whereas plasma-enhanced chemical vapor deposition (PECVD) with a lower temperature and a high deposition rate of up to 200 nm/min is used for a thick film. ,, …”

Section: Introductionmentioning

confidence: 99%

Reactive Force Field Molecular Dynamics Study of the Effects of Gaseous Species on the Composition and Crystallinity of Silicon–Germanium Thin Films

Uene

Mabuchi

Zaitsu

et al. 2023

Crystal Growth & Design

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We simulated the growth of a silicon–germanium (SiGe) film using reactive force field molecular dynamics (ReaxFF MD) in combinations of SiH3, SiH2, GeH3, and GeH2 radicals to evaluate the effects of gaseous species on thin-film composition and crystallinity and to understand the growth mechanisms. The film compositions could be estimated in these combinations because of the linear increase in the Ge content of the films. The average crystallinity grown by SiH3 was higher than that by SiH2 radicals. The crystallinity of the film grown by SiH3 radicals tends to be drastically decreased by GeH2 radicals. The growth mechanisms for XH3 and XH2 (X = Si or Ge) radicals were compared. XH3 radicals abstracted surface H atoms, and then more XH3 radicals chemisorbed onto the formed dangling bonds, resulting in film growth through a two-step reaction known as the Eley–Rideal-type (ER-type) mechanism. The ER-type mechanism grows the film with a low hydrogen content and high crystallinity. In contrast, XH2 radicals displayed not only the ER-type mechanism but also a one-step reaction, the H-capturing mechanism, which incorporates surface H atoms into the gaseous species. The H-capturing mechanism results in film growth with high hydrogen content and low crystallinity. The growth mechanisms are influenced by high/low H-coverage. The surface H atoms thermally move around the bonded atoms and give their kinetic energy to the diffusing gaseous species. Excess surface H atoms promote desorption. Our results from the ReaxFF MD suggested experimental settings and conditions that would enable the growth of high-quality films. Our results also suggested that SiH3 and GeH3 radicals should be mainly generated in the gas phase for high-quality SiGe film growth.

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Biocompatibility and surface properties of hydrogenated amorphous silicon-germanium thin films prepared by LF-PECVD

Cited by 10 publications

References 18 publications

A Review: Electrode and Packaging Materials for Neurophysiology Recording Implants

A Review: Electrode and Packaging Materials for Neurophysiology Recording Implants

Structural, biocompatibility, and antibacterial properties of Ge–DLC nanocomposite for biomedical applications

Reactive Force Field Molecular Dynamics Study of the Effects of Gaseous Species on the Composition and Crystallinity of Silicon–Germanium Thin Films

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