Biological functionalization of massively parallel arrays of nanocantilevers using microcontact printing

Guillon, S.; Salomon, Sven; Seichepine, Florent; Dezest, Denis; Mathieu, Fabrice; Bouchier, Aude; Mazenq, Laurent; Thibault, Christophe; Vieu, Christophe; Leïchlé, Thierry; Nicu, Liviu

doi:10.1016/j.snb.2011.10.084

Cited by 16 publications

(15 citation statements)

References 11 publications

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“…Ink-jet coating has been demonstrated in microcantilever arrays for functionalization with DNA probes 108 and for positioning bacterial cells on microcantilevers 80,109 . Recently, a method based on microcontact printing has been successfully developed for biofunctionalization of a large-scale array of nanocantilevers 110 . The method relies on the delivery of the molecules from the grooves of the stamp while its base sits on the chip, thus providing the needed mechanical stability to avoid breaking the cantilevers.…”

Section: Immobilization Of Receptors In Arraysmentioning

confidence: 99%

Biosensors based on nanomechanical systems

Tamayo¹,

Kosaka²,

Ruz³

et al. 2013

Chem. Soc. Rev.

358

239

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The advances in micro-and nanofabrication technologies are enabling increasingly smaller mechanical transducers capable of detecting the forces, motion, mechanical properties and masses that emerge in biomolecular interactions and fundamental biological processes. Thus, biosensors based on nanomechanical systems have gained considerable relevance in the last decade. This review provides insight into the mechanical phenomena that occur in suspended mechanical structures when either biological adsorption or interactions take place on their surface. This review guides the reader through the parameters that change as a consequence of biomolecular adsorption: mass, surface stress, effective Young's modulus and viscoelasticity.The mathematical background needed to correctly interpret the output signals from nanomechanical biosensors is also outlined here. Other practical issues reviewed are the immobilization of bioreceptor molecules on the surface of nanomechanical sensors and methods to attain that in large arrays of sensors. We describe then some relevant realizations of biosensor devices based on nanomechanical systems that harness some of the mechanical effects cited above. We finally discuss the intrinsic detection limits of the devices and the limitation that arises from non-specific adsorption.2

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Section: Immobilization Of Receptors In Arraysmentioning

confidence: 99%

Biosensors based on nanomechanical systems

Tamayo¹,

Kosaka²,

Ruz³

et al. 2013

Chem. Soc. Rev.

358

239

View full text Add to dashboard Cite

show abstract

“…With very small resonators being built due to advances in nanofabrication, they can provide ultra-high sensitivity [15]- [17]. These advances have also enabled the potential of making several sensors on a single substrate and thereby providing multifunction sensors [18]- [21]. However, it is difficult to use these due to separate drive and readout connections required for each resonator, which increase the number and total size of bond pads.…”

Section: Introductionmentioning

confidence: 99%

A Simple Technique to Readout and Characterize Coupled MEMS Resonators

Tao

Choubey

2016

J. Microelectromech. Syst.

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Highly sensitive microelectromechanical system (MEMS) resonators have been used for extensive applications like mass sensing. However, these arrays are prone to process variations and are difficult to characterize due to lack of connections with each resonator. Coupled array of such sensors can enhance functionality while reducing interconnections. This scheme allows a number of sensors to be read out using a single input/output channel. By perturbing the spring constant of one resonator, two sets of eigenvalues can be measured to reconstruct the system matrix of the coupled system. However, perturbation on MEMS devices can introduce non-linear or physical change. To prevent such undesired change, this paper proposes a technique to couple an electrical resonator to an array of MEMS resonators. Two sets of eigenvalues can therefore be measured by simply connecting/disconnecting the electrical resonator. Errors introduced by frequency noise, array size, coupling strength and damping have been analysed. The successful coupling between electrical and mechanical resonators brings huge promise for integrated MEMS devices that could be used for single input/output multisensor and monitoring variations in MEMS fabrication.

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“…Thus, the stamp protrusions act as supports, and only the center of the feature contacts the substrate . This printing technique was utilized to deposit PZT thin films on prepatterned Si cantilevers, depicted in Figure C, to allow internal circuitry to control the actuation and sensing capabilities for a biosensing microelectromechanical (MEMS) devices, which in previous work was controlled through an external testing setup …”

Section: Introductionmentioning

confidence: 99%

Additively patterned ferroelectric thin films with vertical sidewalls

et al. 2016

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The functional properties of electroceramic thin films can be degraded by subtractive patterning techniques used for microelectromechanical (MEMS) applications. This work explores an alternative deposition technique, where lead zirconate titanate (PZT) liquid precursors are printed onto substrates in a desired geometry from stamp wells (rather than stamp protrusions). Printing from wells significantly increased sidewall angles (from ~1 to >35 degrees) relative to printing solutions from stamp protrusions. Arrays of PZT features were printed, characterized, and compared to continuous PZT thin films of similar thickness. Three‐hundred‐nanometer‐thick printed PZT features exhibit a permittivity of 730 and a loss tangent of 0.022. The features showed remanent polarizations of 26 μC/cm2, and coercive fields of 95 kV/cm. The piezoelectric response of the features produced an e31,f of −5.2 C/m2. This technique was also used to print directly atop prepatterned substrates. Optimization of printing parameters yielded patterned films with 90° sidewalls. Lateral feature sizes ranged from hundreds of micrometers down to one micrometer. In addition, several device designs were prepatterned onto silicon on insulator (SOI) wafers (Si/SiO2/Si with thicknesses of 0.35/1/500 μm). The top patterned silicon was released from the underlying material, and PZT was directly printed and crystallized on the free‐standing structures.

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Biological functionalization of massively parallel arrays of nanocantilevers using microcontact printing

Cited by 16 publications

References 11 publications

Biosensors based on nanomechanical systems

Biosensors based on nanomechanical systems

A Simple Technique to Readout and Characterize Coupled MEMS Resonators

Additively patterned ferroelectric thin films with vertical sidewalls

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