Birefringence simulation of annealed ingot of calcium fluoride single crystal

Ogino, Hirotaka; Miyazaki, Noriyuki; Mabuchi, Toshiro; Nawata, Teruhiko

doi:10.1016/j.jcrysgro.2007.10.005

Cited by 12 publications

(7 citation statements)

References 5 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Higher deposition temperature leads to smaller strain in EuO, which is likely due to strain relaxation. 34,35 It was reported in Ref. [34] that dramatic softening of CaF 2 due to localized plastic flow starts at 400 o C. As seen in the inset of Fig.…”

Section: Resultsmentioning

confidence: 70%

Sign of the superexchange coupling between next-nearest neighbors in EuO

et al. 2012

View full text Add to dashboard Cite

show abstract

Section: Resultsmentioning

confidence: 70%

Sign of the superexchange coupling between next-nearest neighbors in EuO

et al. 2012

View full text Add to dashboard Cite

show abstract

“…Because CaF 2 has a transition point at around 950 C [17], the residual strain and the slip plane can be reduced by annealing at 1000 C or more. If the residual strain is very large, such as when an ingot cracks when cutting, it is necessary to perform annealing.…”

Section: Annealing Processmentioning

confidence: 99%

“…A technique to calculate the relationship between the birefringence generated by the thermal annealing history of CaF 2 was developed and used to optimize the annealing conditions [17]. The as-grown crystal should be heated to a temperature (>1300 C) close to the melting point.…”

Section: Annealing Processmentioning

confidence: 99%

Czochralski Growth of Oxides and Fluorides

Sarukura

Nawata

Ishibashi

et al. 2015

Handbook of Crystal Growth

View full text Add to dashboard Cite

“…In our previous study [1], we have already developed a method for simulating the birefringence of an annealed ingot of CaF 2 single crystal for a lens material in the wafer-stepper of the semiconductor lithography. CaF 2 single crystal is the cubic system, whereas MgF 2 single crystal is the tetragonal system.…”

Section: Introductionmentioning

confidence: 99%

Birefringence simulation of annealed ingot of magnesium fluoride single crystal

Kitamura

Miyazaki

Mabuchi

et al. 2009

Journal of Crystal Growth

View full text Add to dashboard Cite

a b s t r a c tWe developed a method for simulating birefringence of an annealed ingot of MgF 2 single crystal for lithography optics. This method provides the optical path difference caused by crystal symmetry and residual stress existing in the crystal. The method consists of the heat conduction analysis, the residual stress analysis and the birefringence analysis. Because there exists no experimental data on the inelastic behavior of MgF 2 single crystal, the residual stress was estimated with the elastic thermal stress analysis using the finite element method by assuming a stress-free temperature. In this analysis, the temperature dependence of material properties and crystal anisotropy were taken into account. In the birefringence analysis, the distributions of optical path difference were calculated by an approximate method using the result of the residual stress analysis. This approximate method uses the average stress along the wave normal and is equivalent to the exact method in case of low stress dealt with the present study. In this analysis, it is possible to consider both the intrinsic birefringence and the stress birefringence in any crystal orientation. The distribution of the optical path difference in the annealed ingot obtained from the present calculation agrees qualitatively with that of the experiment. Its calculated value also agrees reasonably well with that of the experiment, when a stress-free temperature is adequately selected.

show abstract

Birefringence simulation of annealed ingot of calcium fluoride single crystal

Cited by 12 publications

References 5 publications

Sign of the superexchange coupling between next-nearest neighbors in EuO

Sign of the superexchange coupling between next-nearest neighbors in EuO

Czochralski Growth of Oxides and Fluorides

Birefringence simulation of annealed ingot of magnesium fluoride single crystal

Contact Info

Product

Resources

About