2014
DOI: 10.1063/1.4896667
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Bit patterned media optimization at 1 Tdot/in2 by post-annealing

Abstract: We report on the fabrication of 1 Tdot/in 2 bit patterned media with high coercivity (H C ) and narrow intrinsic switching field distribution (iSFD) based on nanoimprint from a master pattern formed by e-beam guided block copolymer assembly onto a carbon hard mask and subsequent pattern transfer via etching into a thin CoCrPt perpendicular anisotropy recording layer. We demonstrate that an additional vacuum annealing step after pattern transfer into the CoCrPt layer and after Carbon hard mask removal not only … Show more

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Cited by 14 publications
(9 citation statements)
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“…However, in the discrete island BPM geometry, with distinct trench regions in between islands, the thermally activated Cr diffusion is much more extensive. In a previously reported annealing study we focused on Cr-rich Co70Cr18Pt12 media and optimized annealing temperature and time for that specific case [39]. Here we note that with other CoCrPt media layer compositions fabricated at 1 Td/in 2 BPM we have obtained HC above 8 kOe and iSFD/HC values below 5% (see Fig.…”
Section: Bsupporting
confidence: 50%
“…However, in the discrete island BPM geometry, with distinct trench regions in between islands, the thermally activated Cr diffusion is much more extensive. In a previously reported annealing study we focused on Cr-rich Co70Cr18Pt12 media and optimized annealing temperature and time for that specific case [39]. Here we note that with other CoCrPt media layer compositions fabricated at 1 Td/in 2 BPM we have obtained HC above 8 kOe and iSFD/HC values below 5% (see Fig.…”
Section: Bsupporting
confidence: 50%
“…15,21 Recently, most progress has been achieved by moving from pre-patterned substrates and subsequent blanket-deposition of the magnetic material to BPM based on full-film deposition with subsequent post-etching for forming isolated magnetic island BPM. 2,22,23 These systems completely avoid the noise and demagnetization challenges that trench material in BPM based on pre-patterned substrates presents.…”
Section: -2mentioning
confidence: 99%
“…Enormous efforts are devoted to the development of magnetic materials with perpendicular magnetic anisotropy (PMA) for bit-patterned media (BPM) [1][2][3][4][5][6][7] and magnetic random access memory (MRAM). [8][9][10][11][12][13][14][15] In fact, materials with PMA have higher magnetic anisotropy energy compared to their counterparts with in-plane anisotropy.…”
Section: Introductionmentioning
confidence: 99%