2013
DOI: 10.1117/12.2033707
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Black-Si as a platform for sensing

Abstract: The nano-textured surface of black silicon can be used as a surface-enhanced Raman scattering (SERS) substrate. Sputtered gold films showed increasing SERS sensitivity for thicknesses from 10 up to 300 nm, with sensitivity growing nonlinearly from around 50 nm until saturation at 500 nm. At 50 nm, a cross over from a discontinuous to a fully percolated film occurs as revealed by morphological and electrical measurements. The roughness of the Au coating increases due to formation of nanocrystallites of gold. St… Show more

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Cited by 2 publications
(3 citation statements)
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“…Compared to the 1 μm SiNWs, the 10 μm SiNWs exhibit much lower reflectivity (below 8%) in the visible spectrum range due to the enhanced light trapping of higher SiNWs. In the previous research on SiNW-based SERS substrates, the large surface area of the SiNWs is featured for enhancing SERS signals [9,10,[12][13][14]. On the other hand, high aspect ratio SiNWs are also applied as black Si surfaces to exhibit an anti-reflection property.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…Compared to the 1 μm SiNWs, the 10 μm SiNWs exhibit much lower reflectivity (below 8%) in the visible spectrum range due to the enhanced light trapping of higher SiNWs. In the previous research on SiNW-based SERS substrates, the large surface area of the SiNWs is featured for enhancing SERS signals [9,10,[12][13][14]. On the other hand, high aspect ratio SiNWs are also applied as black Si surfaces to exhibit an anti-reflection property.…”
Section: Resultsmentioning
confidence: 99%
“…The advantages of the vertical dimension were not fully developed. Black Si surfaces fabricated by reactive ion etching were investigated by Gervinskas et al for SERS sensing [13,14]. They discussed the influences on SERS signals at different thicknesses of the metal film coating and different solid angles (numerical aperture of excitation/collection optics) on the detection signals.…”
Section: Introductionmentioning
confidence: 99%
“…4,9 The large surface area and well-ordered patterning provide a huge potential to improve the SERS detection sensitivity and signal uniformity. Future work is required to investigate optimized geometry, such as period and aspect ratio of the SiNWs and to develop the best approach to decorate metal nanostructures on the SiNWs for SERS sensing applications.…”
Section: Nmmentioning
confidence: 99%