Blue laser lithography for making antireflective submicron structures on silicon

Tsai, Rung-Ywan; Cheng, Chung-Ta; Yang, Chin-Tien; Chen, Shuen-Chen; Huang, Chun-Chieh; Chen, Shih-Wei; Lu, Wen-Haw

doi:10.1007/s10043-013-0031-4

Cited by 2 publications

(4 citation statements)

References 11 publications

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“…The geometric distribution, size, and period of the nano-Au can be easily tuned by modulating the power and duration of the pulsed blue laser beam. Compared with other commercial lithography systems, the blue laser lithography system is compact and cost-effective.…”

Section: Resultsmentioning

confidence: 99%

“…Compared with other commercial lithography systems, 21 the blue laser lithography system is compact and cost-effective.…”

Section: ■ Results and Discussionmentioning

confidence: 99%

“…The focused blue laser source was modified from a commercial optical pickup head (PUH) module of a Blu-ray read-only memory (BD-ROM). Owing to its repeatability, low cost, and ease of manufacturing, 21 such an approach is suitable for mass production of a large number of NGD arrays. NGD arrays with different sizes and structures can be obtained on glass substrates by controlling the laser output power and the duration and composition of the inorganic photoresist.…”

Section: ■ Introductionmentioning

confidence: 99%

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Fabrication of a Nanogold-Dot Array for Rapid and Sensitive Detection of Vascular Endothelial Growth Factor in Human Serum

Yang¹,

Tsai

Chen

et al. 2016

ACS Appl. Mater. Interfaces

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A simple and accurate device for early detection of malignancies is paramount for prompt treatment and prevention of metastases. In this study, we describe a novel fabrication method for producing an ordered nanogold-dot array with strong localized surface plasmon resonance (LSPR) and narrow bandwidth. The array was used as an optical biosensing chip for the detection of vascular endothelial growth factor 165 (VEGF165) in human serum. The biochip was constructed by conjugating an anti-VEGF antibody, a specific biorecognition element for VEGF165, onto the array via the fragment crystallizable (F) region of the antibody, ultimately increasing the efficiency of VEGF165 detection. The resulting biochip was sensitive, had a wide linear detection range (0.01-100 ng/mL), was specific for VEGF165 (showing no interference when challenged with glucose and ascorbic acid), and characterized by an excellent stability (allowing storage and transportation at room temperature). Owing to the good correlations of VEGF165 measurements obtained with ELISA, we believe that our chip holds promise as a tool for early diagnosis of cancer.

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Section: Resultsmentioning

confidence: 99%

“…Compared with other commercial lithography systems, 21 the blue laser lithography system is compact and cost-effective.…”

Section: ■ Results and Discussionmentioning

confidence: 99%

Section: ■ Introductionmentioning

confidence: 99%

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Fabrication of a Nanogold-Dot Array for Rapid and Sensitive Detection of Vascular Endothelial Growth Factor in Human Serum

Yang¹,

Tsai

Chen

et al. 2016

ACS Appl. Mater. Interfaces

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“…It makes researchers attach importance to self-cleaning and corrosion resistance performances that the active devices are often used in harsh environments including winds, dust storms and acid rains. Various designs of micro-/nano-structures, such as gratings [8], pores [9], nanocones [10], nanotips [11], nanowires [12] and paraboloids [13], have been fabricated to develop antireflective coatings based on the light trapping effect [14][15][16] and the effective medium theory (EMT) [17][18][19]. Brückner et al [20] reported the sub-wavelength structures with patterned cones displayed less than 2% reflectance in the range of 3 μm -5 μm.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of hierarchical moth-eye structures with durable superhydrophobic property for ultra-broadband visual and mid-infrared applications

et al. 2019

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Multifunctional antireflective coatings have practical applications as important optical components in many fields, especially for optical devices and imaging systems. However, a good antireflection application in the visible region is often unsatisfactory for mid-infrared devices, and the difficulty for obtaining multiple capabilities simultaneously is one of the main factors limiting their applications. In this work, the hierarchical moth-eye structures with superhydrophobicity were fabricated via inductively coupled plasma-reactive ion etching (ICP-RIE) using nanodisc-array masks, which were formed by three-beam laser interference lithography (LIL), for improving the ultra-broadband optical properties. The uniform antireflection efficiency, which was close to 1%-reflectivity covering over the visual and mid-infrared wavelength range, was exhibited by the moth-eye structures with high-quality pillar arrays. Additionally, irregular nanostructures were tailored onto the top of the pillars to generate the hierarchical moth-eye structures for simultaneously obtaining both the superhydrophobic and anticorrosive properties. The fabricated antireflective structures with the features of self-cleaning and durability have the advantage of being for long-term use in harsh environments.

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Blue laser lithography for making antireflective submicron structures on silicon

Cited by 2 publications

References 11 publications

Fabrication of a Nanogold-Dot Array for Rapid and Sensitive Detection of Vascular Endothelial Growth Factor in Human Serum

Fabrication of a Nanogold-Dot Array for Rapid and Sensitive Detection of Vascular Endothelial Growth Factor in Human Serum

Fabrication of hierarchical moth-eye structures with durable superhydrophobic property for ultra-broadband visual and mid-infrared applications

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