“…These materials may be useful in electronic devices operating in a wide variety of extreme or harsh environments (mechanically abrasive, radiative, corrosive, and/or high temperature). Implementation of these materials will require a thorough understanding of their electrical properties, which are profoundly influenced by their composition, 6,7 microstructure, 5 and deposition methods. 8 Considerable research has focused on the electrical transport mechanism, 6 dielectric properties, 7 doping behavior, 9,10 and device performance 3,5 of boron compounds with C, N, and O, such as B 4 C/B 5 C, B x N ͑x Ͼ 1͒ and boron suboxide ͑B x O,x Ͼ 1͒.…”