Bridging the gap between conventional and E-beam testing

Muchα, J.

doi:10.1016/0167-9317(92)90338-r

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

Supporting

Mentioning

Contrasting

Year Published

1994

1996

Publication Types

Select...

Article3

Other1

Relationship

Self Cite0

Independent4

Authors

Journals

Cited by 4 publications

References 16 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

Implementation of laser beam sensitive cells: A new approach for integrated circuits testing

Fouillat

Gervais-Ducouret

Lapuyade

et al. 1994

Quality & Reliability Eng

View full text Add to dashboard Cite

The use of library cells, specially designed for their sensitivity to a laser beam, is a potential solution for both 'observability' and 'controllability' problems encountered by the test engineers. The basic principle relies on the photo-induced current generated in the laser beam-silicon interaction. The 'observation' cells, when probed by the beam, are used to read directly a logic level inside the circuit, whereas the 'control' cells are used to force a particular node of the circuit. A test structure including a 16 bits counter with 16 'observation' cells and 1 'control' cell has been fabricated in BiCMOS technology in order to illustrate this new testing method.

show abstract