Broadband radio frequency MEMS series contact switch with low insertion loss

Li, Mengwei; Liu, Qiuhui; Wu, Qiannan; Yue-ping, Han

doi:10.1007/s00542-018-4201-y

Cited by 11 publications

(9 citation statements)

References 12 publications

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“…RF MEMS switches have superior RF performance in terms of insertion loss, isolation, power handling, and linearity over other RF switching devices [ 10 ]. To date, past advances in metal-to-metal contact MEMS switches have made the monolithic fabrication of high-quality switched-wire true-time delay (TTD) networks a relatively easy task.…”

Section: Theory and Designmentioning

confidence: 99%

“…This paper is organized as follows. We first recall the RF MEMS switch theory foundations while proposing a single-ended cantilever metal contact RF MEMS switch [ 10 ] model with excellent performance in DC~50 GHz. We put forward a model for a true-time delay unit in the TTDL network, which consists of a tee junction and three RF MEMS switches loading a GCPW line.…”

Section: Introductionmentioning

confidence: 99%

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The Design of a Novel 2-42 GHz MEMS True-Time Delay Network for Wideband Phased Array Systems

Shi

Gao

et al. 2023

Micromachines

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This article presents the design method of a compact MEMS switched-line true-time delay line (TTDL) network over a wide frequency range extending from 2 to 42 GHz using TTDL units. The TTDL units, namely the cascading radio frequency micro-electromechanical system (RF MEMS) switches and GCPW, were employed in the proposed TTDL network to improve the delay-bandwidth product (DBW) while maintaining its compact size and low delay variation (DV). For comparison, a theoretical analysis of the RF MEMS switch was performed while observing the switch performance with various top electrodes. The MEMS TTDL network has a compact size of 5 mm×5 mm, with a maximum delay of 200 ps and a minimum of 30 ps. The maximum insertion loss of 9 states is 10 dB, and the in/out return loss is better than 20 dB across 2-42 GHz. The group delay variations are within ±2.5% for all the delay states over the operating frequency range. To the best of our knowledge, the proposed TTDL network obtains the most control bits among the TTDL networks offered to date.

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Section: Theory and Designmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

The Design of a Novel 2-42 GHz MEMS True-Time Delay Network for Wideband Phased Array Systems

Shi

Gao

et al. 2023

Micromachines

Self Cite

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“…The RF MEMS switch (Radio-Frequency-Micro-Electro-Mechanical) cantilever switch is constructed with low actuation voltage [1] and it controls the signals by opening and closing with high isolation and zero power consumption smaller size and low cost. For high performance components and delay lines this RF MEMS switches are used.…”

Section: Introductionmentioning

confidence: 99%

Electromechanical and Rf Performance Analysis of Series Configuration Based Mems Switch

Ganesh¹,

Pardhasaradhi²,

Lakshmi³

et al. 2020

jcr

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The paper presents a RF MEMS (Radio-Frequency-Micro-Electro-Mechanical-System) of cantilever series switch which is developed with low actuation voltage which depends upon the beam characteristics and the gap between the plane and metal beam. The MEMS series switch that designed is operating with a frequency range (0-60GHz) and it provides control of the other devices. The RF MEMS switching component consists of a electrode with tuning fork shaped which is fixed using anchor points on coplanar waveguide lines to decrease the actuation voltage and the insertion loss of the switch. The Air gap in between the tuning fork shaped electrode and actuation electrode of RF MEMS series switch is designed to boost the isolation attributes of the switch with less actuation voltage. The switching voltage for designing the switch is 18 V. The designed RF MEMS series switch can be used for subsystem level for broadband applications and communication devices.

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“…Because of the non-linear behavior the electrical solid-state switches are not that much preferable for wide band communication applications [1]. So, the researchers are reluctant to opt electrical switches for future communication applications.…”

Section: Introductionmentioning

confidence: 99%

“…Electromechanically switches are offering high linearity compared with electrical switches because of that the RF micromechanical switches are offering low insertion, best isolation, nominal power consumption. Crosstalk can be mitigate with the help of micromechanical switches at very high frequency range [1]. In the last decade period, many researchers are showing interest on RF MEMS switches and advanced the work and proposed many solutions to the research challenges on RF MEMS switches.…”

Section: Introductionmentioning

confidence: 99%

Cantilever Based Series Metal Contact RF MEMS Switch with Reduced Pull-in voltage and RF losses

2020

IJETER

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In this paper, a cantilever-based series metal contact radio frequency micromechanical switch is designed with reduced pull-in voltage and RF losses. The paper also discusses the cantilever structural analysis. The analysis is extended with single and multiple contact regions. The switch RF losses are reduced by placing separate contact regions. The circular holes are placed to micromechanical structure which eventually helped to minimize the necessary pull-in voltage. The RF MEMS switch proposed in this paper is offering an pull-in voltage of 8.5V, insertion losses -0.62dB, isolation losses -62dB.

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Broadband radio frequency MEMS series contact switch with low insertion loss

Cited by 11 publications

References 12 publications

The Design of a Novel 2-42 GHz MEMS True-Time Delay Network for Wideband Phased Array Systems

The Design of a Novel 2-42 GHz MEMS True-Time Delay Network for Wideband Phased Array Systems

Electromechanical and Rf Performance Analysis of Series Configuration Based Mems Switch

Cantilever Based Series Metal Contact RF MEMS Switch with Reduced Pull-in voltage and RF losses

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