Laser-induced well-ordered and controllable wavy patterns are constructed in the deposited metal thin film. The micrometer-sized structure and orientation of the wavy patterns can be controlled via scanning a different size of rectangle laser spot on the films. Ordered patterns such as aligned, crossed, and whirled wave structures were designed over large areas. This patterning technique may find applications in both exploring the reliability and mechanical properties of thin films, and fabricating microfluidic devices. There is much current interest in the induced micropattern formation technique for their potential applications in microdevices. [1][2][3][4][5] Various patterns with interesting morphologies such as hillocks, 6 straight blisters, 7 and wavy patterns, [8][9][10][11][12] have been reported formation in compressed thin film-resulted from the thermal-induced mechanism. Some of these morphologies, such as the wavy patterns, have been ubiquitously observed in many different film-substrate systems, including deposited metal, 13-15 covalent-ionic compounds, 16 and diamondlike carbon films 17-19 on Si, glass, and steel substrates, respectively, which hint at a certain universality of underlying mechanics. The complexity of the blister shapes and the patterns has both fascinated and befuddled investigators, especially when the experimental and theoretical knowledge of the detailed mechanism is still unclear and the patterns are still unpredictable and uncontrollable. [20][21][22][23][24][25][26] Here, a laser-induced micropattern technique is reported to realize the controllability and be very helpful to the explanation of this phenomenon.Controllable wavy pattern formation in thin films in this study is presented in a schematic diagram [Figs. 1(a)-1(d)]. Aluminum films with typical thickness of 300 nm were deposited onto a glass substrate by an ac magnetron sputtering technique. During sputtering deposition, the substrate temperature was kept at 120°C, and then the system was cooled down slowly to room temperature ͑25°C͒ [ Fig. 1(a)]. With that, a rectangular laser beam focused on the area of smooth surface [ Fig. 1(b)]. The instantaneous injection of the thermal flux separated the irradiated region of the film from the substrate immediately due to the abrupt thermal expansion of the film and the large elastic mismatch between the film and the substrate. Then the film, as shown schematically in Fig. 1(c), delaminated from the substrate and deformed into wrinkles right away through the release of the internal compressive stress. The formation of the wavy pattern in the delaminated region is due to the existence of the isotropic biaxial compression in the film [ Fig. 1(d)]. This phenomenon is very sensitive to the laser flux with a certain range of energy when the compressive stress existed in thin filmsubstrate combinations.The process of the wavy structure formation is recorded by the Figs. 1(e)-1(g). The laser pulse, with a pulse energy of 600 J / m 2 and a spot size of 12.5ϫ 7.5 m 2 , was applied on t...