Building embedded microchannels using a single layered SU-8, and determining Young's modulus using a laser acoustic technique

Huang, Yu; Balogun, Oluwaseyi; Li, Biao; Murray, Todd W.; Zhang, Xin

doi:10.1088/0960-1317/14/11/020

Cited by 52 publications

(33 citation statements)

References 19 publications

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“…The photostructurable epoxy polymer SU-8 [8] has become a viable alternative to Si for a number of MEMS applications, especially for microfluidics [9]. The material can be deposited and patterned like a photoresist by spin-coating and UV-exposure with the added advantage that high aspect ratios and long-term mechanical stability are possible.…”

Section: Methodsmentioning

confidence: 99%

Materials, effects and components for tunable micro‐optics

Friese

Werber

Krogmann

et al. 2007

IEEJ Transactions Elec Engng

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An overview of recent activities in the area of tunable micro-optical components is given. These include polymer-based deformable mirrors for adaptive optics, tunable microlenses and arrays using fluids and membranes, pneumatically actuated scanning micromirrors and tunable Bragg filters and mirrors using swelling polymers. For each device, the structure, essential fabrication technology and optical characteristics, as well as a discussion of application areas are presented. 

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Section: Methodsmentioning

confidence: 99%

Materials, effects and components for tunable micro‐optics

Friese

Werber

Krogmann

et al. 2007

IEEJ Transactions Elec Engng

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“…Direct writing techniques using a laser [65], an electron beam [66], or an ion beam [67] also allows partial or 3-D exposure. Partial exposure techniques suits well to the fabrication of micromechanical parts.…”

Section: Partial Exposure and Direct Writingmentioning

confidence: 99%

SU‐8 as a structural material for labs‐on‐chips and microelectromechanical systems

et al. 2007

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Since its introduction in the nineties, the negative resist SU-8 has been increasingly used in micro- and nanotechnologies. SU-8 has made the fabrication of high-aspect ratio structures accessible to labs with no high-end facilities such as X-ray lithography systems or deep reactive ion etching systems. These low-cost techniques have been applied not only in the fabrication of metallic parts or molds, but also in numerous other micromachining processes. Its ease of use has made SU-8 to be used in many applications, even when high-aspect ratios are not required. Beyond these pattern transfer applications, SU-8 has been used directly as a structural material for microelectromechanical systems and microfluidics due to its properties such as its excellent chemical resistance or the low Young modulus. In contrast to conventional resists, which are used temporally, SU-8 has been used as a permanent building material to fabricate microcomponents such as cantilevers, membranes, and microchannels. SU-8-based techniques have led to new low-temperature processes suitable for the fabrication of a wide range of objects, from the single component to the complete lab-on-chip. First, this article aims to review the different techniques and provides guidelines to the use of SU-8 as a structural material. Second, practical examples from our respective labs are presented.

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“…Such structures on the surface of metals, semiconductors, dielectrics or polymers allow for generation of new properties for materials with very specific electrical, mechanical or chemical characteristics. Depending on the specified material parameters and structure morphology, new systems may be realised, such as bio-sensors [7], microflow systems [8][9][10], templates for biological applications [11] and photonic structures [12]. The first 1D and 2D profiles created by means of the laser system described in the article on the surface of thin DLC layers on a silicone substrate are currently researched regarding their use in scaffolds for the growth of biological cells.…”

mentioning

confidence: 99%