2015
DOI: 10.1109/tpel.2014.2357334
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Built-in Reliability Design of Highly Integrated Solid-State Power Switches With Metal Bump Interconnects

Abstract: A stacked substrate-chip-bump-chip-substrate assembly has been demonstrated in the construction of power switch modules with high power density and good electrical performance. In this paper, special effort has been devoted to material selection and geometric shape of the bumps in the design for improving the thermomechanical reliability of a highly integrated bidirectional switch. Results from 3-D finite-element simulation indicate that for all design cases the maximum von Mises stresses and creep strain accu… Show more

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Cited by 35 publications
(2 citation statements)
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“…The two substrates in each of the four IGBT modules are 0.3/0.32/0.3 Cu/Si 3 N 4 /Cu substrates because of sufficiently high thermal conductivity and good thermo-mechanical reliability [7]. The conductive shims are made of 1/4/1 Cu/Mo/Cu sandwiched structure, which has coefficients of thermal expansion compatible with IGBT and FRD chips [8]. All the power and signal/control terminals are made of oxygen-free copper (OFHC) with high thermal and electrical conductivities.…”
Section: B Materials and Bonding Technologiesmentioning
confidence: 99%
“…The two substrates in each of the four IGBT modules are 0.3/0.32/0.3 Cu/Si 3 N 4 /Cu substrates because of sufficiently high thermal conductivity and good thermo-mechanical reliability [7]. The conductive shims are made of 1/4/1 Cu/Mo/Cu sandwiched structure, which has coefficients of thermal expansion compatible with IGBT and FRD chips [8]. All the power and signal/control terminals are made of oxygen-free copper (OFHC) with high thermal and electrical conductivities.…”
Section: B Materials and Bonding Technologiesmentioning
confidence: 99%
“…Junction-and double-side cooling have been pursued for SiC devices by replacing the traditional wire bonds with interconnect methods that enable direct heat transfer from the device junction to the substrate or lead frame. Examples of such interconnect methods include soldering lead frames or substrates directly to the die topside contacts [20,76,92], soldering or sintering Cu, Mo or Cu-Mo posts or bumps between the die and the substrate [93][94][95][96], and drilling and electroplating Cu-filled vias for PCB-embedded packages [97][98][99]. As an example, the use of Cu and Mo posts in a double-side cooled configuration was utilized to achieve an overall R th,j-c of just 0.17 • C W −1 for a 10 kV, 25 A SiC MOSFET [85].…”
Section: Sic Diode and Mosfetmentioning
confidence: 99%