Bulk acoustic wave resonator operating at 8GHz for gravimetric sensing of organic films

Rey-Mermet, Samuel; Lanz, R.; Muralt, Paul

doi:10.1016/j.snb.2005.04.047

Cited by 83 publications

(53 citation statements)

References 13 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Recently, a number of experimental and theoretical studies of the mass sensitivity of different FBAR devices both operating in the shear and the longitudinal thickness excited mode [3,[5][6][7][8][9] have been presented, where the shear mode FBAR has been utilized successfully for biosensor applications [1][2][3]10,11]. The studies of the mass sensitivity have, however, to the authors' knowledge, so far not been sufficiently extensive or complete and do not provide a comprehensive view of the major factors influencing the mass sensitivity.…”

Section: Introductionmentioning

confidence: 99%

Mass sensitivity of multilayer thin film resonant BAW sensors

Wingqvist

Yantchev

Katardjiev

2008

Sensors and Actuators A: Physical

View full text Add to dashboard Cite

Section: Introductionmentioning

confidence: 99%

Mass sensitivity of multilayer thin film resonant BAW sensors

Wingqvist

Yantchev

Katardjiev

2008

Sensors and Actuators A: Physical

View full text Add to dashboard Cite

“…FBAR mass sensor is considered as an excellent portable healthcare sensor resolution [2,3]. Recent researches mainly focus on relative humidity sensor [4], glycerol detector [5], gravimetric sensing [6], ultraviolet sensor [7], DNA and protein detection [8], microfluidic system [9], and so on. However, by now FBAR mass sensors are handled with network analyzer and RF probe station, which is massive and various with testing environment.…”

Section: Introductionmentioning

confidence: 99%

Processing Chip for Thin Film Bulk Acoustic Resonator Mass Sensor

Jin

Dong

Jin

et al. 2012

Journal of Control Science and Engineering

View full text Add to dashboard Cite

Aimed at portable application, a new integrated process chip for thin film bulk acoustic resonator (FBAR) mass sensor is proposed and verified with 0.18 um CMOS processing in this paper. The longitudinal mode FBAR with back-etched structure is fabricated, which has resonant frequency 1.878 GHz and Q factor 1200. The FBAR oscillator, based on the current-reuse structure, is designed with Modified Butterworth Van Dyke (MBVD) model. The result shows that the FBAR oscillator operates at 1.878 GHz with a phase noise of −107 dBc/Hz and −135 dBc/Hz at 10 KHz and 100 KHz frequency offset, respectively. The whole process chip size with pads is 1300 μm × 950 μm. The FBAR and process chip are bonded together to sense tiny mass. The measurement results show that this chip precision is 1 KHz with the FBAR frequency gap from 25 kHz to 25 MHz.

show abstract

“…The application of the silicon-based micromachining technology on bulk acoustic resonators creates film bulk acoustic resonators (FBARs). Compared with the QCM, the FBAR sensor has much higher sensitivity and comparable mass resolution, because the piezoelectric film of the FBAR sensor is much thinner, and the operating frequency is much higher (700 MHz-20 GHz) [11][12][13][14][15][16][17][18][19] . Furthermore, the micromachining process of the FBARs is more compatible with the integrated circuits (IC), making the monolithic integration of the FBARs with signal process circuits easier.…”

Section: Introductionmentioning

confidence: 99%

“…Currently, two types of structures are designed for the FBARs to reduce the acoustic energy dissipation into the substrates [22] . The first type is a solidly mounted resonator (SMR) that is formed by isolating the resonator from the substrate with a Bragg reflector [12][13][14][15]19,[23][24] . The second one is an air cavity type resonator that is connected to the substrate only at the edges of the resonator [16][17][18]25] .…”

Section: Introductionmentioning

confidence: 99%

Active control scheme for improving mass resolution of film bulk acoustic resonators

Liu

Yin

et al. 2011

Appl. Math. Mech.-Engl. Ed.

View full text Add to dashboard Cite

High mass resolution of sensors based on film bulk acoustic resonators (FBARs) is required for the detection of small molecules with the low concentration. An active control scheme is presented to improve the mass resolution of the FBAR sensors by adding a feedback voltage onto the driving voltage between two electrodes of the FBAR sensors. The feedback voltage is obtained by giving a constant gain and a constant phase shift to the current on the electrodes of the FBAR sensors. The acoustic energy produced by the feedback voltage partly compensates the acoustic energy loss due to the material damping and the acoustic scattering, and thus improves the quality factor and the mass resolution of the FBAR sensors. An explicit expression relating to the impedance and the frequency for an FBAR sensor with the active control is derived based on the continuum theory by neglecting the influence of the electrodes. Numerical simulations show that the impedance of the FBAR sensor strongly depends on the gain and the phase shift of the feedback voltage, and the mass resolution of the FBAR sensor can greatly be improved when the appropriate gain and the phase shift of the feedback voltage are used. The active control scheme also provides an effective solution to improve the resolution of the quartz crystal microbalance (QCM).

show abstract

Bulk acoustic wave resonator operating at 8GHz for gravimetric sensing of organic films

Cited by 83 publications

References 13 publications

Mass sensitivity of multilayer thin film resonant BAW sensors

Mass sensitivity of multilayer thin film resonant BAW sensors

Processing Chip for Thin Film Bulk Acoustic Resonator Mass Sensor

Active control scheme for improving mass resolution of film bulk acoustic resonators

Contact Info

Product

Resources

About