Bulk disc resonators radial and wineglass mode resonance characterization for mass sensing applications

Zarifi, Mohammad H.; Daneshmand, Mojgan

doi:10.1007/s00542-015-2549-9

Cited by 4 publications

(3 citation statements)

References 19 publications

(16 reference statements)

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“…Distributed mass sensitivity slopes have exhibited a linear frequency downshift with the added mass ( Figure 5). Mass sensitivities of 4.28 kHz/pg for DETF and 1.8 kHz/pg for bulk WGD devices have been reported for the first time for partially-filled-gap resonators (Figure 6), values comparable to the ones presented in recent literature for MEMS resonators [3,8,9]. …”

Section: Resultssupporting

confidence: 84%

“…Capacitively transduced MEMS resonators have been proven to achieve resonance frequency times quality factor (f0xQ) products of the order of 10 13 [1], evidencing to be promising candidates to be used in communications [2] and environmental mass sensing applications [3]. Partially-filled-gap capacitive MEMS disks resonators were proposed in [4] to attain lower motional impedance, Rm, better electromechanical coupling and more robustness against electrodes-resonator collapse.…”

Section: Introductionmentioning

confidence: 99%

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Low Impedance ALD HfO2 Partially-Filled-Gap Flexural and Bulk MEMS Resonators Piezoresistively Detected for Distributed Mass Sensing

Lopez

Casu

Fernández-Bolaños

et al. 2017

Proceedings of Eurosensors 2017, Paris, France, 3–6 September 2017

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This paper reports the design and characterization of partially-filled-gap capacitive MEMS resonators for distributed mass sensing applications. By filling the gap with HfO2, the coupling coefficient between electrode-resonator increases by ×6.67 times and the motional resistance decreases by ×12 times in comparison with its counterpart in air. An improvement by a factor of ×5.6 in the Signal-To-Noise Ratio (SNR) for DC bias up to ×2.8 lower is accomplished by performing a piezoresistive detection instead of capacitive detection. Quality factor (Q) of 11,350 and motional resistances (Rm) of 926 Ω have been achieved for Parallel Beam Resonators (PBR) vibrating at 22.231 MHz. For the first time, ALD HfO2 partially-filled-gap MEMS resonators are proven to achieve inertial distributed mass sensitivities of the order of 4.28 kHz/pg for beam-type and 1.8k Hz/pg for disk resonators.

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Section: Resultssupporting

confidence: 84%

Section: Introductionmentioning

confidence: 99%

Low Impedance ALD HfO2 Partially-Filled-Gap Flexural and Bulk MEMS Resonators Piezoresistively Detected for Distributed Mass Sensing

Lopez

Casu

Fernández-Bolaños

et al. 2017

Proceedings of Eurosensors 2017, Paris, France, 3–6 September 2017

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“…Over the past decades, two types of lateral bulk vibration modes have been mainly investigated for BAW resonators, with applications as oscillators, sensors, and filters: (i) the extensional (breathing) mode and the (ii) the WG mode of square-plate or disk structures [ 26 , 57 , 58 , 59 , 60 , 61 , 62 , 63 , 64 ]. Figure 1 and Figure 2 show a square plate and a disk BAW resonator, respectively, both exhibiting these two modes.…”

Section: Fundamentals Of Baw Resonatorsmentioning

confidence: 99%

A Review on Coupled Bulk Acoustic Wave MEMS Resonators

Wang

et al. 2022

Sensors

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With the introduction of the working principle of coupled resonators, the coupled bulk acoustic wave (BAW) Micro-Electro-Mechanical System (MEMS) resonators have been attracting much attention. In this paper, coupled BAW MEMS resonators are discussed, including the coupling theory, the actuation and sensing theory, the transduction mechanism, and the applications. BAW MEMS resonators normally exhibit two types of vibration modes: lateral (in-plane) modes and flexural (out-of-plane) modes. Compared to flexural modes, lateral modes exhibit a higher stiffness with a higher operating frequency, resulting in a lower internal loss. Also, the lateral mode has a higher Q factor, as the fluid damping imposes less influence on the in-plane motion. The coupled BAW MEMS resonators in these two vibration modes are investigated in this work and their applications for sensing, timing, and frequency reference are also presented.

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MEMS Resonators for Frequency Reference and Timing Applications

Xu²,

et al. 2020

J. Microelectromech. Syst.

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Bulk disc resonators radial and wineglass mode resonance characterization for mass sensing applications

Cited by 4 publications

References 19 publications

Low Impedance ALD HfO2 Partially-Filled-Gap Flexural and Bulk MEMS Resonators Piezoresistively Detected for Distributed Mass Sensing

Low Impedance ALD HfO2 Partially-Filled-Gap Flexural and Bulk MEMS Resonators Piezoresistively Detected for Distributed Mass Sensing

A Review on Coupled Bulk Acoustic Wave MEMS Resonators

MEMS Resonators for Frequency Reference and Timing Applications

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